Used TEL / TOKYO ELECTRON PHP Oven for ACT 8 #9314751 for sale

TEL / TOKYO ELECTRON PHP Oven for ACT 8 is an advanced photoresist equipment used for a range of critical lithographic processes. It provides a combination of features that support precise, repeatable, and consistent development of photoresist layers, which are essential for the manufacture of semiconductor and microelectronic devices. TEL PHP Oven for ACT 8 utilizes advanced proprietary vacuum technology to achieve a high resolution with excellent line edge and line width control. In addition, the system has an optimized geometry which facilitates superior process performance. The PHP Oven also features a novel energy transfer unit that enhances uniformity and repeatability, and provides rapid thermal heat transfer. Furthermore, this oven energy is precisely monitored and controlled to ensure process repeatability and reproducibility, and to provide the required high performance. Furthermore, TOKYO ELECTRON PHP Oven for ACT 8 includes a broad range of integrated modular process options. These are designed to address the specific planarization, lithography, and post-exposure baking needs of the modern photoresist process. For instance, a programmable floating hotplate and a multi-zone option are available for specialized processes. The PHP Oven allows the development of photoresist layer with superior resolution, line edge uniformity, and repeatable particle-free results. Furthermore, where integrated post-processing is required, the PHP Oven can be combined with an integrated ash oven for the critical clean processes. In summary, PHP Oven for ACT 8 is an advanced photoresist machine that combines several features to ensure high performance and optimal process repeatability. It facilitates the production of superior photoresist layers in a rapid and reliable manner, while also offering integrated module options for specialized processes. As such, it is an ideal choice for critical lithography and planarization processes.