Used TEL / TOKYO ELECTRON Spare parts for ACT 8 #293668194 for sale

Part number / Description: P521EE / R010 / PCB Backplane board 2981-600652-W1 / CSS PCB Board 2981-600371-11 / FDD PCB Connection board CT381-642216-4 / 308-640611-2 / I/O Assy board 2981-600351-11 / C/S Stage board 3G8F7-DRM21-2 / OMRON PCB Controller CT2910-190942-11 / Chill plate - / Cup Kit - / HPO Block with harn assy, fprox, delay, bracket 3S86-000280-14 / CB6S8S-4-M1 / PCB Relay module 381-639094-8 / TVME-UIOPCB / - - / Stainless steel cup kit CT2985-428252-16 / Chamber chamber assy 381-642664-1 / - 2910-292847-11 / Upper cup - / Set-Up fixture, 8" - / DEV Cup assembly - / CUP sensor (dev) assembly CT5040-000137-11 / MR-J4W2-22B-MB011T02 / MITSUBISHI AC Servo CT2910-190942-11 / Chill plate - / PCB Backplane board 2981-600652-W1 / CSS PCB Board - / Hot plate MSD043A1Y03 / PANASONIC Z-Axis driver 2L80-000212-12 / Multi channel driver.