Used TEL / TOKYO ELECTRON Spare parts for Clean Track Mark 7 / 8 #293656853 for sale

Name: TEL / TOKYO ELECTRON Spare parts for Clean Track Mark 7 / 8
Brand: TEL / TOKYO ELECTRON
SKU: 293656853
Availability: InStock

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Photo Used TEL / TOKYO ELECTRON Spare parts for Clean Track Mark 7 / 8 For Sale

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Manufacturer

TEL / TOKYO ELECTRON

Model

Spare parts for Clean Track Mark 7 / 8

Equipment Details
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ID: 293656853

Description: Arm ceramic, 4"-8" Mapping assy, 4"-8" SANYO DENKI / 103-4505-7040 / X-Axis motor Y-Axis Assembly X-Axis Assembly Z-Axis Assembly OPE Pane CONN board 3 CONN Board TAIYO Boards Arm I/F Board C/S Unit ( 1120 x 500 x 167 AC 100V ) FFU Filter Frame Spin unit frame C/S Stage P/R Bath drain assy P/R Dispense arm nozzle Spin unit connection board Scan arm board Scan arm CONN Board Spin cover latch board sw Coater cup assy, 6"-8" Coater SUS Cup assy, 8" Spin motor Vacuum seal and housing Spin motor driver (PADT-300WD AC Servo driver) Spin chuck Base plate back side plate EBR Nozzle assy EBR Needle (0.3 mm) BSR Needle (0.5 mm) P/R Buffer tank (45CC) P/R Bottle cap H Nozzle assy E2 Nozzle assy Stream nozzle, ¼" Main arm HS Conn A Board Main arm HS Conn B Board Main arm assy (3) Main arm pincette (3) Main arm pincette(X Motor) Main arm stepping motor (P/N: 103H7522-80E3) Main arm HS Conn C-board Main arm spring cable Silicon wafer glass wafer modify (Cover, AMP, sensor M/A Cooling panel) (3) Main arm pincette (Wafer blocks) Main arm ribon cable Diskette drive, 3.5" Dual SSD back up NEC PC 9801F, 9821 KA, KE Data back up Coater I/O C Board develop I/O C Board Heater unit I/O BS Board OPE Pane unit I/O BS HMDS assy HMDS Buller tank HPO assy Plate oven (HPO Temperature: 200°C, DHP Temperature: 350°C, HMDS Plate, temperature: 200℃ HP Base assy, Cover Slider assy, HP Support assy, Shutter assy HPO Pin Oven CONN board Plate CONN board Thermo controller (P/N: INR 244-113) Cool plate assy CHP Unit assy Buffer tank (3 Liters) SUS Canister (20 Liters) CONN Board CONN Board (P/R Auto supply, multi option) CONN Board (HMDS auto supply, multi option) Assy boards WEE Lamp stage assy (Lamp, Stage overhaul test) Thermo controller (P/N: INR 244-112 T) AC Power box T&H Controller assembly C/S Unit frame 4 C/D FFU Frame Pillar frame C/S Unit AC 100 V, FFU Filter M/A FFU Filter.