Used TEL / TOKYO ELECTRON Spare parts for Mark 8 #293773569 for sale
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ID: 293773569
Qty / Description
( 1 ) / Main frame body
( 1 ) / Main arm Y-Axis Frame
( 1 ) / Main arm assy
( 1 ) / Main arm fan base
( 1 ) / Main arm driver box assy
( 1 ) / Main arm Y-Axis Motor
( 1 ) / Main arm Z-Axis Motor
( 1 ) / Main arm Y Motor driver
( 1 ) / Main arm Z Motor driver
( 3 ) / Circulators
( 1 ) / N2 Filter
( 1 ) / Air regulator and gauge
( 1 ) / N2 Main regulator and gauge
( 1 ) / Vac regulator and gauge
( 1 ) / PCW regulator and gauge
( 1 ) / DIW regulator and gauge
( 2 ) / Air main folders
( 2 ) / EXH Main folders
( 2 ) / EXH Duct bracket
( 3 ) / Circulator setting bracket
( 2 ) / M/A Driver setting brackets
( 1 ) / N2 Filter setting bracket
( 2 ) / AC Power consent
( 2 ) / Oven base assy
( 2 ) / E5ZD Board
( 5 ) / LHP Unit assy
( 1 ) / AD Unit assy
( 2 ) / CP Unit assy
( 1 ) / Oven base side cover
( 1 ) / HP Unit side cover
( 1 ) / Oven unit sol valve
( 1 ) / AD Unit sol valve
( 1 ) / AD Ejector valve assy
( 1 ) / Oven unit speed con assy
( 1 ) / AD EXH Pip
( 2 ) / Cooling power supplies
( 1 ) / Thermo con
( 2 ) / Cooling power brackets
( 1 ) / Multi controller bracket
( 2 ) / Spin unit assy
( 2 ) / Spin motors
( 2 ) / Spin motor drivers
( 2 ) / Spin motor driver brackets
( 2 ) / Spin unit connection boards
( 2 ) / EBR Drivers
( 2 ) / Spin vac sol
( 2 ) / Spin sol block assy
( 2 ) / Coat cup assy
( 2 ) / Developer cup assy
( 2 ) / PR Nozzle assy
( 2 ) / Developer nozzle assy (stream nozzle)
( 2 ) / Spin operation panel
( 2 ) / Step controller
( 2 ) / Dummy dispense panels (PR)
( 2 ) / Dummy dispense panels (DEV)
( 2 ) / User boards
( 2 ) / EXH Manometer and boards
( 2 ) / Spin vac gauges
( 2 ) / Spin EXH Gauges
( 1 ) / Leak board assy
( 2 ) / Flow meter board assy
( 1 ) / AD Bubble board assy
( 1 ) / Coater EBR Flow meter
( 1 ) / Coater back rinse flow meter
( 1 ) / Coater RRC Flow meter
( 1 ) / Coater solvent bath flow meter
( 1 ) / Developer flow meter
( 1 ) / Developer rinse flow meter
( 1 ) / Developer back rinse flow meter
( 1 ) / HMDS Vaper flow meter
( 1 ) / HMDS Bubbling flow meter
( 1 ) / HMDS Dilution flow meter
( 1 ) / Developer back rinse drain valve
( 1 ) / N2 2kg Unit regulator and gauge
( 1 ) / Flow meter sensor assy
( 2 ) / PR Pumps (bellows pump)
( 2 ) / PR Filter hausing
( 4 ) / PR Drain valve
( 1 ) / PR Pump rack
( 2 ) / Resist operated valve
( 2 ) / Coater EBR Operated valve
( 2 ) / Coater back rinse operated valve
( 2 ) / Coater solvent bath operated valve
( 1 ) / PR Bottle rack assy
( 2 ) / PR 45cc L/E Tank assy (sensor)
( 2 ) / PR Bottle cap assy
( 1 ) / Coater damper
( 1 ) / Coater drain bath assy
( 1 ) / Coater dyke
( 1 ) / Developer dyke
( 1 ) / Leak sensor
( 1 ) / Developer filter rack assy
( 1 ) / Developer drain valve
( 1 ) / Water jacket
( 1 ) / Developer operated valve
( 1 ) / Developer rinse operated valve
( 1 ) / Developer back rinse operated valve
( 1 ) / Developer water jacket setting bracket
( 1 ) / HMDS Rack assy
( 1 ) / HMDS Drain tank
( 1 ) / HMDS Bubbler tank
( 1 ) / Developer auto dapmer assy
( 1 ) / Main block cable
( 1 ) / Tube and fitting
( 1 ) / ETC (Bracket)
( 1 ) / C/S Block assy
( 1 ) / C/S Arm driver box
( 1 ) / C/S Y Axis Motor
( 1 ) / C/S Z Axis Motor
( 1 ) / C/S Z Axis Motor driver
( 1 ) / C/S Y Axis Motor driver
( 1 ) / C/S Cassette stage
( 1 ) / C/S Cassette block and sensor
( 1 ) / Monitor assy
( 1 ) / Main controller assy
( 1 ) / On-Line board
( 1 ) / Key PIO Board
( 1 ) / PC LAN Board
( 1 ) / Dual card
( 1 ) / PDP Back up module
( 1 ) / DC Power box assy
( 1 ) / AC Power box assy
( 1 ) / FDD
( 1 ) / Card rack assy
( 1 ) / PDP Power supply
( 1 ) / M/C Connection Board
( 1 ) / C/S Mapping sensor
( 1 ) / Chemical box frame
( 1 ) / 2 Way air operated valve
( 1 ) / 3 Way air Operated Valve
( 1 ) / Check valve
( 1 ) / Solvent regulator and gauge
( 1 ) / Developer regulator and gauge
( 1 ) / N2 2kg Unit regulator and gauge
( 4 ) / 3L Buffer tank and sensor assy
( 1 ) / Canister tank assy
( 1 ) / Developer chemical supply board
( 1 ) / Solvent chemical supply board
( 1 ) / DC Power supply
( 1 ) / Chemical supply sol block assy.
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