Used TOK TS-8162FD #293642815 for sale
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ID: 293642815
Wafer Size: 8"
Vintage: 1999
Coater / Developer system, 8"
1999 vintage.
TOK TS-8162FD photoresist equipment is a high-performance industrial system used to manufacture integrated circuits (ICs). The unit features an advanced low-abrasion precision cleaning capability that ensures the highest level of photoresist adhesion and etch resistance. The machine uses highly advanced, laser lithographic etching technology, enabling the production of miniaturized designs on silicon wafers, and has been designed for use in microelectronic manufacturing processes. The tool is designed to offer precise resolution and high-speed throughput while still providing a high degree of flexibility. This is accomplished through a wide selection of features, including a sophisticated in-situ measurement asset, precise dopant control, precise timing adjustment, multiple layer functions, and a variety of layer mix-compensated exchange processes. Additionally, the model includes its own fully automated wet process equipment. The system can be easily integrated into existing production systems, as it is compatible with a wide range of control systems. It also includes an accompanying library of recipes and other resources, enabling users to easily customize their production processes. The unit is unique in its ability to improve the entire production process and to increase the ICs' accuracy and design details. TS-8162FD's reactive ion etching (RIE) is capable of producing high-resolution patterns, with resolutions of up to 1 μm. Its vacuum capabilities allow for transparent substrate processing, allowing for increased production speeds, while the machine simultaneously maintains a high quality of device fabrication. TOK TS-8162FD is powered by a 200-MHz processor, making it a fast and reliable tool. It boasts of a wide variety of features and accessories, including a removable arm to transfer wafers, a wafer tank for washing and a temperature-controlled bubble cleaning station. The asset also has multiple lasers, which can be independently adjusted and configured, making it suitable for a wide range of processes. TS-8162FD is a reliable and capable production model that is ideal for creating a wide range of integrated circuits with an unmatched level of accuracy and precision. Its ability to offer customized production processes and its ability to handle complex processes, make it the perfect choice for microelectronics manufacturers.
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