Used ULTRA OPTICS MR3 #293614892 for sale

ULTRA OPTICS MR3 is a photoresist equipment designed for the special requirements of large-format applications. It handles a wide array of tasks - cleaning, coating, exposure, developing and etching - with a high degree of efficiency and reliability. The system is composed of a number of modular components, each of which is designed with specific purpose. At the heart of the unit is a precision stepper/scanner platform, which performs the actual lithography processes. Its stepper/scanner mechanism is designed to hold any substrate of any size, including wafers up to 300mm in diameter. This ensures precision exposure of all sizes and shapes of photomasks. The exposed substrate is then placed into the post-exposure bake heater and is heated to ensure satisfactory bonding of the photoresist. The rapid curing time and consistent depth of the photoresist layer produced with this oven ensure greater accuracy compared to conventional thermal bonding processes. The cooked substrate is then transferred to the developer station and immersed in a sulphuric acid solution. This process automates the removal of the unexposed photoresist from the substrate and reveals the desired patterns, which can be further processed. Moreover, the integrated etching machine is able to perform deep-etching and dry-etching. The tool also includes a precision spinner for cleaning the substrate of residual photoresist and other materials. The asset comes with its own workflow software, which enables users to create multiple job settings and track the lithography process, as well as customize various parameters such as exposure time, exposure temperature and baking temperature. To sum up, MR3 is an advanced photoresist model with a high degree of accuracy and reliability. It is fully automated, allowing for quick and convenient processing of a large variety of substrates, and its integrated software helps to easily tailor the process for different applications. It provides a high-quality production of devices, components, and any other products requiring a photolithographic process.