Used ULTRON SYSTEMS INC / USI UH 114 #9237154 for sale

ULTRON SYSTEMS INC / USI UH 114 is a photoresist equipment that is designed to etch and develop silicon wafers using a light source for precision performance. Using advanced light imaging technology, USI UH 114 achieves accurate exposed photoresist image patterns on wafers up to 200mm in diameter and coats them with high-quality resist. The photoresist system has a fully automated track and alignment unit and an advanced automated spray process for exact performance on a wide variety of silicon wafers. ULTRON SYSTEMS INC UH114 is able to accurately control the uniformity, process speed, line to line registration, and global registration characteristics with precision. It is also capable of determining the optimal processing parameters for the best resist profile performance. The machine utilizes a high-resolution (HR) stepper in order to provide users with high-fidelity imaging and accurate exposure control. The stepper provides the process repeatability and accuracy needed for the printing of high-definition lithographic images. UH114 is capable of utilizing a variety of photo mask types, including, but not limited to, quartz, chrome-on-quartz (EtchMask), glass, and GaAs. This tool also supports high speed wafer movement, allowing for higher yields. UH 114 can operate in two, three, or four exposure mode based on customer preferences. In two exposure mode, the wafer is simultaneously exposed to two photoresist layers. In three exposure mode, a clear film layer is included between the photoresist layers to increase uniformity and reduce cross-halo. In four exposure mode, a flood expose is used to apply the photoresist uniformly across the entire wafer surface. ULTRON SYSTEMS INC UH 114 also features proactive diagnostics to ensure that every photomask pattern is fully met during etch separation and development. It is equipped with a wet etch inspection station, which allows users to inspect the photomask post etch and development in order to ensure high yield. In addition, the asset has an integrated verification station to inspect the wafer surface for any defects. ULTRON SYSTEMS INC / USI UH114 integrates advanced technology to deliver improved operational performance with high-precision results. A secure configuration model ensures precise repeatable processes and improved wafer yields. It is designed to provide users with reliable results in a reliable operating environment.