Used VERTEQ 1600-2 #9169238 for sale

Manufacturer
VERTEQ
Model
1600-2
ID: 9169238
Dual stack spin rinser dryer FLUROCARBON 1600 Super Clean Parts machine.
VERTEQ 1600-2 equipment is an advanced photoresist production system designed to create feature sizes down to 0.2 µm while maintaining high accuracy and repeatability. This unit consists of a delivery machine, a controller, and a photoresist coating and exposure process module. The delivery tool comprises a micropositioning robot to precisely move a spindle-mounted substrate plate. Tooling features allow for a wide range of substrates and sizes. This offers high accuracy and low latency with load and unload times of three seconds. The spindle uses a standard pitch to accommodate a wide variety of substrates and substrates sizes for plug-n-play ease of use. The onboard controller features a programmable logic controller (PLC) that integrates with the optical asset interface for automated extraction, delivery, and location. Using this interface, unique universal design allows measurements to be taken and recorded from a variety of substrate types, with features and data stored in a continuous data trace. The PLC is programmed with separate programming libraries to control the movement of the robot, acceleration and deceleration of the spindle, and other factors. Finally, the cutting-edge photoresist process module provides excellent uniformity over the active area with a special algorithm used to accurately match the substrate size and shape profile. This module offers excellent control of resist thickness, allowing for accurate resist thickness control across a wide range of coating layer thicknesses. High-precision, high-reproduction capabilities are achieved through use of the module's specialized optics and photomask. Overall, 1600-2 photoresist model is designed for vacuum deposition and resists up to 0.2 µm in size. Programmable PLC and intelligent delivery equipment ensures high accuracy and repeatability. Special optics allows for the precise control of resist thickness and excellent uniformity over the active area. VERTEQ 1600-2 is an excellent choice for photoresist applications in the semiconductor, microelectronics, and biotech industries.
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