Used VERTEQ 1800-6AR #9328733 for sale

VERTEQ 1800-6AR is a state-of-the-art photoresist equipment designed for use in microelectronic fabrications. It is a modular, high-resolution, one-step photoresist system based on an alignment table consisting of a mechanical module, an exposure module, and a moving table. The unit includes an alignment table, a stepper/scanner module and a stepper/mask alignment module. The alignment table features a dual-axis (X,Y) adjustable linear stage and has a precision of 1.4 µm. The stepper/scanner module consists of a motorized full-aperture telecentric illuminator, an automatic adjustment focus machine, and a motorized wafer stage. The stepper/mask alignment module allows for precise overlay of the mask onto the wafer. The tool is powered by an advanced microprocessor control unit that is capable of controlling all aspects of the exposure process, from alignment checks to pixel sizes and exposure time. The asset has an embedded darkroom with a full power control model for infrared pre-exposure, post-exposure and development processes. The equipment also has an integrated particle counter for measuring cleanliness of the UV or I-line work chamber, as well as particle/cleaning activity monitoring. 1800-6AR provides resolution up to 12 µm, with feature sizes as small as 2.0 microns. The system provides tuning bandwidth (FW/BW) tuning less than 20% on all non-critical features, and high resolution on short features. The unit is user-friendly and can be operated in automated or semi-automated formats, allowing for an efficient workflow without compromising accuracy. VERTEQ 1800-6AR is a reliable and high-performance photoresist machine with an excellent track record in microelectronic fabrication applications. Its dynamic range, high resolution, easy-to-use interface and integrated particle counter make it a great choice for any microelectronics laboratory and production environment.