Used VERTEQ VPA-1987 #9165582 for sale

VERTEQ VPA-1987
Manufacturer
VERTEQ
Model
VPA-1987
ID: 9165582
Spin rinse dryer.
VERTEQ VPA-1987 Photoresist Equipment is a computer-controlled, high-resolution, vacuum-processable photoresist system used for microfabrication applications. The unit is capable of exposing and processing micro-scale feature sizes and structures as small as 0.05 microns, using advanced microlithography processes. With its 4.4-inch diameter wafer stage, VPA-1987 provides automated wafer handling and loading for accurate and repeatable exposure and processing results. The fully automated wafer flip mechanism in the machine ensures precise alignment of resist films and substrates even when processing 8-inch wafers with long tracks. The wafer stage can also be used to process rectangles, squares, circles, or patterns up to 4 inches wide. The tool includes a high-resolution contact printing head with a resolution of 0.005 microns or better. The advanced auto-focus feature ensures accurate and precise printing on the substrate. The built-in motorized shutter asset provides uniform exposure throughput and accuracy. A calibrated Laser Interferometer for measuring and adjusting wafer tilt is also included. The model uses a broad range of positive and negative resists, with the flexibility to accept new resist materials. In addition, VERTEQ VPA-1987 offers variable processing time from 0.1 seconds to 10 minutes and temperature settings from - 20 degrees C to 150 degrees C. The programmable switching feature allows the equipment to perform various jobs at an unparalleled speed. The photoresist system is equipped with a color monitor and powerful built-in software. It allows the user to set parameters for exposed images and the number of wafers that can be processed at a time. The results can be monitored on the screen during the processing run. VPA-1987 is a robust and reliable photoresist unit with superior positional accuracy and reliability, allowing the user to create complex microstructures with ease. Together with advanced features such as precision exposure, temperature control, and multi-wafer processing capabilities, VERTEQ VPA-1987 Photoresist Machine is an ideal tool for microfabrication applications.
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