Used VPT Argus 58 #9199501 for sale

Manufacturer
VPT
Model
Argus 58
ID: 9199501
Optical coater, 58" Chamber: Width: 58" Depth: 28" Water-cooled chamber Stainless steel (2) Opening doors Integrated stand Vacuum pumping system: Pumping system for chamber includes: EDWARDS GXS 160/1750 Dry pump and blower package (2) PFEIFFER ALCATEL ATP 2804 Maglev turbo-pumps CTI CT10 Cryo pump ADIXEN ALCATEL ADS-501 Dry pump \ blower package Substrate fixture system: (6) Diameter planets, 16" Process system: (3) MAGNETRON DC Sputters, 8" (3) ADVANCED ENERGY 10 kW power supplies (2) Sputtering cathodes co-sputtering function (3) SIERRA APPLIED SCIENCE INC Sputtering cathode, target 8" diameter (203.2 mm) CCR Cobra DN 400 RF-Plasma Source, 16" ADVANCED ENERGY 13.56 MHz RF Power supply 5.5 kW (4) VPT 2 kW Quartz lamp heaters Type J thermo couple probe INFICON XTC-3 With (6) crystal heads Ion current monitoring: Faraday cup Power systems includes: Integrated power distribution enclosure PC \ PLC Based control system: Factory talk Human Machine Interface (HMI) ALLEN BRADLEY Logix PLC controller Utility requirements: Power supply: 208 VAC, 65 kVA, 50/60 Hz.
VPT Argus 58 is a photoresist equipment designed for wafer fabrication and microlithography applications. The system is capable of producing high-definition images with a resolution of up to five times that of conventional tools, while offering high repeatability and ultra-low UV exposure time. The unit is capable of operating at low resist pressure and low UV exposure levels, enabling accurate patterning of micro- and nanoscale features. The machine utilizes a helium-neon laser to induce photosensitive molecules to deposit onto the wafer in controlled patterns. This yields highly accurate and consistent patterns, which is critical for microlithography applications. The tool is well suited for a variety of tasks such as photolithography, laser patterning, and resist coating. The asset includes a 12-inch stepper/scanner for wafer alignment and precise resist deposition. It is also equipped with a computer-controlled laser beam spot size model for precise beam control, and a software-based beam scanning equipment to scan the resist across the wafer surface. This allows for submicron-level resolution on resist deposition. Argus 58 also includes optional features such as a helium-neon super-resolution quadrant feature, which enables patterns to be spliced together with a gap of less than 10µm; an automatic optical centering system that precisely aligns the wafer; a cross-wafer synchronization feature for better registration of photosensitive layers; and an Opticlock unit for precise patterning. Overall, VPT Argus 58 is a reliable tool for high-definition microlithography processes. Its features enable precise and accurate patterning, resulting in higher yielding wafers and increased productivity. The machine is simple to use and compatible with a large number of photoresist materials. Argus 58 is an invaluable tool for any semiconductor facility and is a must-have for producing the most advanced integrated circuit devices.
There are no reviews yet