Used YUASA LPC-5211 #9392166 for sale

YUASA LPC-5211 is a photoresist equipment designed for the manufacture of advanced patterned circuits. This system utilizes a unique combination of lithography and etching processes to produce precise and intricate patterns with minimum dimensional margins. LPC-5211 utilizes a lithography technique of using light-sensitive photoresist material with a mask to create a pattern on a substrate. The specific photoresist material used can vary in composition based on the application with most common photoresists being epoxysuch as polymethyl methacrylate (PMMA). The photoresist material is exposed to light from the mask and any conformal areas of photoresist will remain while the remaining areas of the substrate will be exposed to an etching process to remove material. The unit includes a 15" stepper/scanner that offers a patterning resolution of up to 5µm and a stepping resolution of 2µm. This resolution is further enhanced by a unique two-dimensional laser interferometer that provides very precise patterning and alignment during the exposure step. The etching process of YUASA LPC-5211 utilizes an oxygen-based plasma etching machine that includes a high-power microwave generator to provide high etch rates and controlled depths. The tool provides impressive etching rate of up to 0.6µm/minute and an etching depth of up to 1µm with an adjustable power from 10-40 Watts. LPC-5211 is also equipped with numerous safety functions such as gas flow control, vacuum monitoring, and temperature control to ensure safe and accurate photoresist exposure and etching processes. The asset is also capable of self fault diagnosis and automatic shut down if a fault is detected to prevent costly damage. Overall, YUASA LPC-5211 is a reliable and sophisticated photoresist model designed for the production of high quality and intricate circuits. Its high resolution, superior etching rate and safety features make it the ideal equipment for a variety of photoresist applications.