Used YUASA SR-8040A #9375925 for sale

YUASA SR-8040A is a high end, automated photoresist process equipment designed for semiconductor production. This model is highly automated, capable of handling over 15 processes for up to 10 wafers at a time. YUASA SR-8040 A is equipped with a proprietary 5-stage heat control system for superior substrate heating and cooling control. It also features a built-in process monitoring unit, allowing for more precise resist-coat uniformity. The unit can handle a variety of substrates up to 8'' in size, and the wafer alignment precision is within 2.5 µm. The machine also features a high-intensity UV lamp source for direct imaging. The lamp source is designed with a quartz-glass insulated exit window for enhanced UV uniformity. SR-8040A offers a variety of resist processing capabilities, including masking, pre-bake, post-bake, exposure, post-exposure bake, developing, bake, etch, and metrology. The exposure unit is equipped with a frequency-stabilized LED light source, allowing for precision alignment. This machine also offers both high-speed and low-speed developing and etching processes. The tool is designed with ample irradiation control, allowing users to precisely control dose and time. The chamber interior is designed with a plasma-cleaning mechanism to remove contamination and maximize yield. The touch-panel user-interface allows for speedy and accurate process setting. SR-8040 A also features a unique vacuum pre-edge clean function. This is especially useful in high-density resist applications, as it removes unnecessary resist across the wafer, leaving only the intended resist. It also has a front end filter to keep impurities from entering the process chamber. To operate YUASA SR-8040A, users must follow strict safety procedures. Proper training is critical; users must be familiar with the machine's specifications and safety protocol before use. Proper maintenance is also essential. Regularly check circuit boards and other components to ensure they are functioning properly. YUASA SR-8040 A offers an exceptional level of photoresist process control for precise results. From substrates up to 8'' to intense UV light for direct imaging, this top-of-the-line asset is essential for achieving the highest level of circuit production.