Used KLA / TENCOR 1007 #9150404 for sale

KLA / TENCOR 1007 is a semiconductor wafer inspection and metrology tool, designed for the precise analysis of patterned silicon wafers produced by the photolithographic lithography process used in the manufacture of integrated circuits. KLA 1007 Prober utilizes advanced optics, image processing algorithms and a variety of metrology software to measure detailed parameters of the patterns on the wafers. TENCOR 1007 Prober equipment consists of a robotically-positioned wafer stage, optics for image acquisition and illumination, specialized illumination sources and imaging modes, a variety of wafer inspection and metrology (IM) software algorithms, and powerful data processing and analysis hardware and software. The system is engineered to provide extremely precise measurements in various metrology applications such as process monitoring, yield analysis and failure analysis. The Prober includes an advanced image analysis unit for detecting lithographic errors such as overcuts, undercuts, bridging and other structural defects. It also provides three-dimensional analysis of surface features using white light interferometry. The Prober can be modified to include an Automated Defect Analysis (ADA) option, which can detect, classify and measure geometric and structural defects from a single image. The machine also includes a proprietary High Contrast Inspection (HCI) mode which improves the detection of subtle and often difficult to detect anomalies. The Prober also includes a comprehensive set of metrology algorithms designed to detect, size and analyze a wide variety of patterning and shape defects. It can perform global measurements such as line widths, critical dimension (CD) and Critical Dimension Uniformity (CDU), as well as more advanced measurements such as line edge roughness (LER), stack measurements and secondary features analysis. For further process control, the Prober has features such as recipe-based substrates mapping to map the entire wafer quickly and accurately. 1007 Prober is compatible with various photomasks, resists and etch chemistries, and can be integrated with an SEM platform for cross-platform verification and correlation of data. The Prober's comprehensive metrics data report provides complete traceability to enable improved process control, rapid yield improvement, and accurate feature volume analysis. Overall, KLA / TENCOR 1007 Prober sets a standard in wafer metrology and optimization for semiconductor manufacturing processes.