Used KLA / TENCOR 1201 #9122036 for sale

KLA / TENCOR 1201 is a high-performance, automated prober used for precision mapping and metrology of metallization patterns, photolithography and oxide/polyimide layers on semiconductor wafers or chips. The prober offers accuracy and repeatability for accurate defect analysis and process control. The standard KLA 1201 features an automated wafer handler, loading algorithmic stages with FastScan probe capability, allowing non-contact probing with optical recognition alignment. A dual-stage motion mechanism provides smooth and accurate tool positioning and a wide working×range for larger wafers. Probe patterning is enabled with 8 probes, with 332 x 445 µm resolution for ultra fine-pitch probing. TENCOR 1201 also features automated focus point optimization and true flatness measurement. 1201 offers a number of features to increase productivity and throughput. Parallax Mapping, MultiLayer Mapping and ProbEncoding Technology allow speed and accuracy for mapping semiconductor layers. Automated modules provide efficient process execution, combining high speed, tool accuracy and smooth platform motion. The CoaXPress CXP4 interface supports up to 4 cameras for integrated applications. This feature allows fast data transfer, with a TDI data rate of up to 5.0 Gb/s per camera and highly configurable system. KLA / TENCOR 1201 is equipped with many features to provide a precise alignment of wafers and ensure crisp image quality. An advanced SmartAlignTM system performs high-speed wafer geometrical measurement and fast autofocus for wafer and die basedmap inspection. Other features include AutoAlignTM for die-level alignment compensating for wafer topography and offer a flexible platform to minimize scheduling time and reduce pri testing costs. A MACROTEK sensor technology enables die-level precision registration, with registration accuracy of 3.3 µm @ 3 sigma. The advanced probehead design includes single and double sided contact arms, multiple x-y fine positioning stages for increased throughput and measurement accuracy. KLA 1201 prober is used in semiconductor foundries to analyze microscopic components on wafers and is also used for business continuity/disaster recovery, photomask maintenance, process control and troubleshooting. It is ideal for semiconductor manufacturing with features for increased efficiency, accuracy and consistency.