Used ACCRETECH / TSK ARTS-HS #9244273 for sale

ACCRETECH / TSK ARTS-HS is a rapid thermal processor designed to serve as an ideal platform for the development of Power semiconductor devices, including Power modules and Driver ICs. The processor uses rapid thermal processing and power application technologies to achieve high-speed and accurate thermal processing results in just 15 minutes. It has a high throughput, with 10-15 wafers processed in 15 minutes, and can handle a variety of sample sizes. The processor utilizes a hot plate equipment, mounted on a heavy-duty steel or aluminum frame, to provide an effective thermal environment for rapid thermal processing. The hot plate system includes a high-temperature, high-speed ceramic heating element which helps heat the wafer rapidly and uniformly. The hot plate has a series of temperature sensors embedded in it to ensure reliable and accurate temperature regulation. The temperature of the hot plate is also controlled with a PID temperature controller based on the feedback from the sensors. TSK ARTS-HS can be used with a variety of gas delivery systems to enable rapid, controlled thermal processing. These include carrier, purge, and reactive gases which are delivered between the hot plate and the sample wafer. The processor can also be used with external gas delivery systems for applications such as oxidization and nitridization. The processor is equipped with an automated robot arm which allows the hot plate to be moved to and from the sample wafer, and the sample wafer to be moved to an integrated loader for storage. The robot arm features a vision unit which can be used to monitor the progress of thermal processing and ensures that wafers are accurately aligned with the hot plate. A series of safety interlocks are incorporated in the robot arm which prevent operation of the processor in case the hot plate is moved away from the sample wafer. In addition, ACCRETECH ARTS-HS has a user-friendly software interface which makes it easy to control and monitor the processor's operation. The interface can be accessed from a PC, tablet, or smartphone, and features a range of parameters that can be adjusted to achieve desired results. Overall, ARTS-HS is an advanced rapid thermal processor which offers high-speed accuracy for thermal processing of Power semiconductor devices. Its hot plate machine, gas delivery capabilities, robot arm, and user-friendly software interface all combine to provide outstanding performance that saves time and increases productivity.