Used AET RX-V4 #78797 for sale
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ID: 78797
Wafer Size: 4"
Quartz Rapid Thermal Process unit, 4"
Up to 8 gases
Dry pump included.
AET RX-V4 is an advanced rapid thermal processing equipment designed to facilitate efficient semiconductor device fabrication. RX-V4 is a versatile and reliable tool that enables rapid high-temperature analyses, wafer annealing, deposition, and high-precision die-bonding processes. The system features integrated vertical lift, multiple lift-lift configurations, and integrated wafer mapping. AET RX-V4 incorporates a pre-programmed horizontal arm (Harmonizer) and advanced software diagnostics. This allows for the rapid detection and mapping of individual process parameters and an adaptive design that allows for easy and seamless integration of the unit into a manufacturing environment. The Harmonizer is capable of performing numerous thermal processes, including thick film curing and firing, metal thin film curing, and low temperature thermal processing. The integrated advanced automotive technologies ensure maximum stability and uptime, making it an ideal solution for semiconductor device production processes. The advanced wafer mapping feature of RX-V4 has the capability to visualize and identify individual process steps, enabling users to quickly diagnose and modify various process parameters. The wafer map includes several high-resolution images which can be used to monitor individual process parameters over time. It can be used to monitor the temperature profile during a thermal process, as well as correlating visual inspection data. Additionally, AET RX-V4 can quickly identify defects and other inconsistencies within a sample. RX-V4 is equipped with a high-efficiency vacuum machine and an advanced wafer analysis tool, giving users the ability to perform a wide range of tests and experiments. The Vacuum Asset utilizes a variety of sensor technologies to monitor pressure and temperature in real time. This ensures rapid and accurate optimization and control of the process parameters. Additionally, the wafer analysis model allows for quantitative analyses of wafer features, such as thickness, compositional composition, and contaminant levels. AET RX-V4 is equipped with an intuitive graphical user interface, which is designed to enable easy navigation and intuitive operation. This makes it easier to assess the results of various thermal processes. The equipment also includes advanced self-diagnosing and maintenance functions, ensuring an optimal operation and reliability. Overall, RX-V4 is an efficient and reliable thermal processing system. It is the ideal tool for efficiently fabricating semiconductor devices, and offers an intuitive and comprehensive platform for fast, accurate, and accurate thermal analyses, wafer annealing, deposition and die-bonding processes.
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