Used AG ASSOCIATES 410 C23 #199775 for sale

AG ASSOCIATES 410 C23 is a rapid thermal processor designed to deliver reliable and repeatable substrate heating process to temperatures between 20 and 1500 Celsius with millisecond/second time resolution. This processor is designed to service a wide range of industrial processes, such as used in semiconductor processing, MEMs fabrication and photonic research. This rapid thermal processor offers sample uniformity, uniform temperature distribution and repeatable thermal processes due to its use of a horizontal or vertical conveyor with an integrated temperature profile controller. This allows the process to be set for conventional single wafer processing (RSW) or multiple wafer for multi-wafer configurations (MSW). The wafer can be loaded and unloaded with minimal disruption or shut down time, making it suitable for fabrication applications with calibration improvements and increased throughput capacity. 410 C23 has eleven independent thermal zones, along with five optional dummy zones, and features both direct heating and cooling, as well as both endothermic and exothermal capabilities. It has a scalable chamber design that can accommodate wafers up to 200 mm/8" in diameter. The temperature profile controller also allows for setting up specific shaper temperatures across each zone to ensure most precise and accurate thermal cycles. It has an effective heater capacity of 6 to 8 KW and cooling capacity of up to 1.3 KW. This combined with its direct heating and cooling features ensure very fast thermal cycle times. A true one step thermal process and temperature decorrelation function quickly reduces thermal cycle time by 70% compared to traditional rapid thermal processors. AG ASSOCIATES 410 C23 also has a protective package that provides an oxygen and nitrogen gas system option. This aids in creating an oxygen/Nitrogen atmosphere inside the chamber by working to reduce air contamination. Additional features of 410 C23 include an automated field service utility for swift diagnosis, enhanced system access, and user adjustable safety limit setting for process control. This thermal processor also features real time alarms, integrated data transmission/storage, a dedicated cooling fan that eliminates contamination to the process chamber, along with mirror monitor chambers and an auto wafer flowgraph recorder. Overall, AG ASSOCIATES 410 C23 Rapid Thermal Processor is an incredibly versatile and efficient processor with numerous features, making it an ideal choice for any industrial production process.