Used AG ASSOCIATES 410 #9140495 for sale

AG ASSOCIATES 410 is a rapid thermal processor (RTP) designed to thermally process a wide variety of substrates such as SiO2, Si3N4, polymers, metals, etc. The equipment is capable of performing the following processes in a single cycle: thermal annealing, oxidation, and oxidation anneal. 410 is a reliable and repeatable system that is designed to meet the requirements of semiconductor device and MEMS processing. AG ASSOCIATES 410 is a batch-type unit that consists of a process chamber, controller, and a hot plate machine which supports four substrates at a time. It has a cylindrical quartz process chamber with two Aluminum alloy plates to provide a uniform temperature across the substrate. The tool has a maximum operating temperature of 800°C and is capable of ramping to the temperature in as little as 30 seconds with a uniformity of ±2°C over the substrate. Additionally, the asset is equipped with a forced gas circulation feature which provides for uniform temperature control across multiple substrates. 410 is an advanced model that offers a wide range of features, including advanced temperature measurement and control, automatic wafer alignment, load lock operation, and remote chamber diagnostics. Additionally, the equipment boasts a pressure range of 10Torr to 1000Torr and is compatible with a variety of chamber atmospheres, including N2, H2, Ar and O2. In addition to the features mentioned above, AG ASSOCIATES 410 also offers a simple and intuitive user interface which allows for ease of operation and adjustable parameters. Furthermore, the system offers various analytical and diagnostic functions including O2 plasma etching and Oxidation analysis. Additionally, there is an optional MFC interface which allows for easy integration with a variety of analytical instruments. Overall, 410 is a versatile and reliable rapid thermal processing unit that offers a combination of precision, speed, and repeatability that make it a perfect solution for a wide range of semiconductor device and MEMS processing applications. Its advanced features and user-friendly interface make it easy to operate and maintain. Therefore, it is an ideal machine for manufacturers or research laboratories in need of a fast and efficient RTP tool.