Used AG ASSOCIATES AW-810M #9013662 for sale

AG ASSOCIATES AW-810M is a rapid thermal processor (RTP) designed for high temperature processing of semiconductor devices and materials. The RTP is specifically designed for the processing requirements of Ion Implantation, Epitaxy, Dry and Wet Etching, Diffusion and Rapid Thermal Annealing, N and P+ ion Implantation and other related processes. AW-810M provides precise thermal processing with maximum uniformity and repeatability. The RTP features a high pressure, closed loop heating and cooling chamber, a thermocouple controlled reciprocating stage, and two generators for RF and DC power. AG ASSOCIATES AW-810M is also equipped with an integrated electrical control system and an advanced user interface, which combine to provide precise temperature control with a maximum uniformity of 1.5% across the entire chamber. AW-810M utilizes a quartz tube thermal range that allows for processing temperatures up to 1150°C. The heater has a maximum output power of 4.5kw and can achieve ramp temperatures up to 800°C in one millisecond. To ensure uniform temperatures AG ASSOCIATES AW-810M utilizes a thermoelectric cooling system that provides efficient and rapid thermal cycling, as well as a cooling rate of approximately 100°C per second. The RTP is also equipped with a thermocouple-controlled reciprocating stage, which allows for precise temperature control during process cycles. In addition, AW-810M features two power generators for RF and DC power as well as a liquid nitrogen system for superior temperature uniformity at low pressure. AG ASSOCIATES AW-810M is designed for use in a variety of research and development environments, including universities, research institutes, and industrial laboratories. The RTP is well suited for the processing of semiconductors, enabling processing at dramatically reduced times compared to traditional methods. AW-810M is easy to operate, providing uniform temperatures and precise control over the process variables. The included user interface makes operation and maintenance of the RTP easy and efficient, allowing users to achieve uniform processing results in a short amount of time.