Used AG ASSOCIATES Heatplus 2146 #21341 for sale
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ID: 21341
Wafer Size: 4"-6"
Rapid thermal processor, 4”-6”
Oxide and nitride film deposition
Cassette to cassette handling
Temperature range: 400°C to 1300°C
Single chamber
Parts system.
AG ASSOCIATES Heatplus 2146 is a rapid thermal processor used for high-performance semiconductor device applications. It is engineered from advanced technology and components, to provide an industrial-grade heating solution for any high-efficiency semiconductor process. This advanced equipment is designed to meet the highest standards of performance, quality, reliability and safety. Heatplus 2146 is designed to deliver rapid thermal cycles with reliable temperature accuracy and repeatability. It features two or three independent top and bottom zone elements in a single chamber, each of which can be independently operated or used as a group. The device is also fitted with two or three RTD temperature probes, depending on the configuration. The built-in digital controller provides users with a high degree of control over process parameters and operation. The design of AG ASSOCIATES Heatplus 2146 enables its users to achieve rapid thermal cycle rates by providing shorter heating and cooling times and smoother transitions from one set point to another. Additionally, its stainless steel construction provides a robust frame and environmental protection for the user's semiconductor process. The construction also includes air curtains for temperature control and noise reduction. Heatplus 2146 is a portable and easy to use device. Its intuitive user interface allows users to easily set up the parameters for their desired cycle. This eliminates the need for complex programing and makes it user friendly. Furthermore, its PLC controller and advanced diagnostics capabilities provide a high level of protection, ensuring reliable operation. In conclusion, AG ASSOCIATES Heatplus 2146 is a reliable, efficient and easy to use rapid thermal processor suited for a variety of industrial-grade applications. It offers users advanced temperature accuracy, repeatability, and cycle parameters control in an intuitive and robust frame. The device is well suited for use in high-performance semiconductor processes and is certified for use in a variety of industries.
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