Used AG ASSOCIATES Heatpulse 4108 #9146307 for sale
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ID: 9146307
Wafer Size: 5"-8"
Vintage: 1993
Rapid thermal processor annealing system, 5"-8"
Electronics
Mass-flow-controlled gas handling
Cooling
ULPA Filtration
Mechanical assemblies
Applications:
Silicon dielectric growth
Implant annealing
Glass re-flow
Silicide formation and annealing
Nitridation of metals
Contact alloying
Oxygen donor annihilation
Wafer handling: Automatic serial processing
Standard cassettes
Throughput: Process dependent
Ramp-up rate: Programmable
1 – 180°C Per second
Steady-state duration: 1 – 600 Seconds per step
Ramp-down rate: Programmable
1 – 180°C Per second
Ramp down rate is temperature
Radiation dependent
Maximum 150°C per second
Recommended steady-state temperature range: 400 – 1200°C
ERP Temperature accuracy:
+3°C to -7°C
Calibrated against an instrumented thermocouple wafer (ITC)
Temperature repeatability: + 3°C
Temperature uniformity: + 5°C
1993 vintage.
AG ASSOCIATES Heatpulse 4108 is a high-speed advanced rapid thermal processor designed for stringent process applications. With an advanced, automatic and accurate temperature control, Heatpulse 4108 offers maximum process control and flexibility. AG ASSOCIATES Heatpulse 4108 utilizes a powerful, quartz-coated Silicon carbide source material which provides reliable and precise temperature control. It has a rapid ramp rate of 1000 degrees Celsius per second. Utilizing its advanced temperature controller, Heatpulse 4108 can quickly and accurately adjust its temperature, providing users with extreme precision and reproducibility. Moreover, AG ASSOCIATES Heatpulse 4108 offers superior thermal uniformity. Its multi-zone, quartz-coated Silicon Carbide heating elements ensure uniform temperature distribution on the entire wafer. It also offers improved thermal cycle for better yield and process stability. One of the advantages of Heatpulse 4108 system is its modular, flexible design. It can be operated in either a single-time pulse or a multi-time pulse mode. In addition, AG ASSOCIATES Heatpulse 4108 offers easy-to-configure parameters, allowing users to create their own cycle profiles. Users are able to select from a wide variety of wafer sizes and install customized process recipes. For safety, Heatpulse 4108 is designed with automatic lockout, isolated core, and integrated interlock features. It also has fault diagnostic capabilities with interlock protection. Overall, AG ASSOCIATES Heatpulse 4108 is a reliable and versatile rapid thermal processor. Its precision temperature control, improved thermal uniformity, and customizable cycle profiles make it ideal for harsh and complex process applications.
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