Used AG ASSOCIATES RTP-2106 #9045424 for sale
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ID: 9045424
Wafer Size: 3"-6"
Rapid thermal processor, 3"-6"
Applications:
Implant activation
Silicide formation
Oxide reflow (PSG & BPSG)
Alloying
Cassette to cassette
Microprocessor controlled
Wafers per hour throughput: 60-100
Depending on anneal cycle
Temperature range: 400-1250ºC
Anneal time: 1-300 Seconds
Electrical requirements:
208-240V, 3 Ohm
60A Maximum
Water requirements: 2 GPM at 60-75 PSG.
AG ASSOCIATES RTP-2106 Rapid Thermal Processor (RTP) is a standard rate thermal processor designed to process materials quickly and efficiently. It uses carefully controlled, high-powered thermal processes to treat materials such as semiconductor wafers, flat panel displays, and microelectronic devices. This versatile tool can be used to anneal, activate, oxidize, drive-in, or deposit films onto substrates. RTP-2106 comes equipped with the latest control equipment featuring advanced algorithm-based thermal profiling capabilities, as well as integrated data logging. Advanced sensors and multiple chambers allow for optimal temperature control and uniform heat distribution. AG ASSOCIATES RTP-2106 is capable of reaching temperatures up to 1010°C with an accuracy rate of +/- 2°C. This machine also allows for rapid cycling times, resulting in shorter exposure times, faster process times, and higher yields. RTP-2106 also features integrated safety features, such as over temperature protection, removable SS shielding, an LED warning system with automatic shutdowns, and an emergency stop button. The unit also comes equipped with a built-in vacuum machine, ensuring proper venting of generated vapors. AG ASSOCIATES RTP-2106 is designed with a small footprint, making it ideal for use in small laboratories. The tool is easy to program and operate and can be customized to meet the specific needs of each environment. Additionally, RTP-2106 comes with efficient data analysis features, secure password-protected user access, and a host of traceability tools. Overall, AG ASSOCIATES RTP-2106 is an advanced rapid thermal processor designed to provide reliable and efficient performance at a competitive price. The wide range of features and integrated safety protocols make this asset an ideal choice for any laboratory looking for a versatile and efficient thermal processor.
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