Used ALLWIN21 AW 901e #9201818 for sale
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ID: 9201818
Wafer Size: 3"-6"
TTW Plasma etcher, 3"-6"
Wafer loading: 3-Axis robot
Stationary cassette plate
Plasma power: RF 13.56 MHz
Type: Parallel / Single wafer process
Through the wall (TTW)
Gas lines: 1-3 Lines
Throughput: 30-60 WPH, Process dependent
Temperature: 6-65ºC (±2 ºC) Capability
Gas lines: (4) Gas lines with MFCs
Etcher rate:
AW-901eR: 0-8000A / minute
AW-903eR: 0-4000A / minute
Process dependent
Uniformity: Up to ±3%, Process dependent
Particulate: <0.05 / cm2
Selectivity:
901eR: 2-20:1
AW-903eR: 2-20:1
Process dependent
MTBF / MTTA / MTTR: 450 Hours / 100 Hours / 3.5 Hours
Options:
EOP Module with PCB
GEM/SECS II Function
Lamp tower alarm with buzzer
Throttle valve pressure control
Vacuum pump
Chiller for chuck and chamber
Through the wall
Main frame, standard
Pentium class PC with
Keyboard
Mouse
USB
SW Backup
Cables
Chuck:3"-6"
Wafer aligner / Cooling station
3-Axis integrated solid robot:
H-Zero (Standard)
H1-7 x 10.5 (TTW)
Fixed cassette station:
Chuck assembly
901eR Non-anodized
903eR Anodized with flat
903eR Anodized with flat
903eR Non-anodized with flat
Reactor Assembly:
901eR Non-anodized
903eR Anodized
903eR Non-anodized
903eR High performance
Direct cooling
Non direct cooling
Pins:
Quartz
Ceramic SST
Centering ring:
Aluminum
Ceramic
Main control board:
Gas box with (4) inline gas lines, MFC, filters, and pneumatic valves
RF Matching network with PCB
RF Generator: 13.56 MHz
MKS Elite: 300 HD
MKS Elite: 600 HD
MKS Elite: 1000 HD
ENI ACG 3
ENI ACG 10
AC / DC Box
ATM Sensor
UPC Pressure control
225 SCCM: 901eR
2000 SCCM: 903eR
MKS Baratron with peumatic Iiolation valve
Main vacuum valves
Front EMO interlocks
Touch screen GU, 15"
AW-901eR AW-903eR
Material Etched Polysilicon / Nitride Oxide,SOG,Nitride
Main etchant gases SG6, O2 / SF6,O2 CHF3,SF6,He
Other gases CHCLF2 / None None
Pressure (mTorr) 200-450 / 250-350 1600-3000
RF Power (Watts) 100-250 / 200-300 400-600
Temperature (C) 30 / 30 23
AC Power:
AC Module: 200-240 VAC Selectable, 50/60 Hz, 3-wire single-phase
Temperature controller: 200-240 VAC, 50/60 Hz, 3-wire single-phase
Vacuum pump: 208-230 / 460 VAC, 60 Hz or 200-220 / 380 VAC, 50Hz, 3 Phase
RF Generator: 200-240 VAC
PC / Monitor: 115 VAC
Cabinet exhaust: 100 cfm.
ALLWIN21 AW 901e is a rapid thermal processor (RTP) with a variety of features that make it particularly useful in re-flow soldering applications. In re-flow soldering, solder paste is applied to the board and components. The components are then placed on the board and heated at a high temperature in order to melt the solder and create a reliable electrical connection. AW 901e is designed to provide rapid thermal processing (RTP) with quick cycle times and high temperatures, making it well-suited for this type of application. ALLWIN21 AW 901e has a maximum heating temperature of 350°C, which is higher than many other RTPs on the market. This high temperature ensures that the solder melts quickly and that the electrical connections are reliable. The maximum chamber size is 24"x24", making it suitable for larger applications. The heating element is a ceramic infrared heater, which helps reduce energy costs and provides high temperature accuracy. The unit is also equipped with 3 temperature programs, allowing for flexibility in the manufacturing process. AW 901e is designed with both safety and efficiency in mind. The unit includes a pressure switch that ensures proper air pressure during processing, which helps prevent fires from faulty soldering. The cooling systems are designed to help minimize temperature gradients in the chamber, which helps ensure the components don't overheat and become damaged. The unit also includes a PID temperature controller, which helps ensure precise temperature control and stability. ALLWIN21 AW 901e is highly efficient and provides uniform heating. Thanks to its quick cycle times, it can significantly reduce labor costs during the re-flow soldering process. Its ease of use makes it ideal for production use, and its low cost makes it an attractive option for many businesses. Overall, AW 901e offers a high-performance RTP with quick heating times and uniform heating. With a maximum temperature of 350°C, it is well-suited for re-flow soldering applications, and it includes a variety of features designed for safety and efficiency. It is also cost-effective and easy to use, making it a great option for businesses looking to streamline their soldering process.
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