Used AMAT / APPLIED MATERIALS ACP Radiance #9399900 for sale

AMAT / APPLIED MATERIALS ACP Radiance
ID: 9399900
Vintage: 2012
Rapid Thermal Processing (RTP) system 2012 vintage.
AMAT / APPLIED MATERIALS ACP Radiance is a rapid thermal processor designed to facilitate precision rapid thermal processing of wafers in semiconductor and MEMS (Microelectro Mechanical Systems) foundry applications. This compact, automated equipment provides precise control over the thermal treatment of a wide range of materials with quick response times, high throughput, and uniform temperatures across the substrate. AMAT ACP Radiance utilizes two different types of irradiation and temperature control methods to accurately control the temperature of the substrate. These include both direct and indirect infrared (IR) heating, along with dual/multi-zone gas control and radiation shuttering capabilities. Direct IR heating uses a collimated, input-to-output beam of light from a diode array that is focused onto the sample surface, providing rapid and uniform heating. Indirect IR utilizes a reflector system and a blackbody source to maintain a uniform thermal profile across the sample. The gas control feature on APPLIED MATERIALS ACP Radiance offers an additional level of temperature control and process repeatability to the rapid thermal processing. The unit is able to shuttle multiple gases, from a single process chamber, to the substrate to create different gas concentrations and flow rates. This feature provides more precise temperature control for both short and long duration processes. This innovative thermal processor includes advanced cooling machine components, such as thermocouples, for precise temperature monitoring and control. A closed-loop temperature control tool ensures a constant temperature based on feedback from the asset's monitoring components. This feature helps maintain uniform, repeatable processing with minimal temperature gradient across the wafer. ACP Radiance model is designed to reduce the cycle time for rapid thermal processing without compromising the quality of the process or the reliability of the material. With an intuitive process controller and easy-to-use graphical software interface, AMAT / APPLIED MATERIALS ACP Radiance is easy to operate and program with minimal intervention or manual tuning. This highly versatile thermal processor is suitable for a range of semiconductor and MEMS applications, including advanced high-magnification metrology (AFM/STM/TEM) imaging, wafer bumping, flip-chip bonding, die-bonding, MEMS fabrication, and more. AMAT ACP Radiance provides precise temperature control during rapid thermal processing, allowing users to achieve more consistently processed materials with lower degradation levels.
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