Used AMAT / APPLIED MATERIALS Centura 5200 #9046127 for sale

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ID: 9046127
Wafer Size: 8"
RTP System, 8" Divisional mainframe (2) Load -locks (2) Process chambers (1) Cool-down chamber Data logging capability Wafer rotation: 90 rpm during anneal Chamber heating: 187 tungsten-halogen bulbs in hexagonal pattern Bulbs: 12 concentric zones (grouped) Temperature controllers in software.
AMAT (APPLIED MATERIALS) AMAT / APPLIED MATERIALS Centura 5200 is a high-performance process enhancement reactor engineered to meet the rigorous standards of semiconductor manufacturing. It offers a number of features designed to boost productivity, minimize cost, and optimize product reliability. AMAT Centura 5200 is capable of rapidly processing various materials, including metalloid and III-V compounds, in a controlled environment. It features a non-magnetic stainless steel chamber and a pair of robust quartz bellows and wafer carriers for improved throughput. The equipment incorporates a cooling gas distribution system, along with adaptive cooling ensuring uniform temperatures throughout the chamber. APPLIED MATERIALS Centura 5200 is designed to reduce cycle times, conserve resources and improve product quality. It features a high-speed vertical lift and low-elevation loading and unloading design which reduces cycle times significantly. The unit also boasts a sophisticated thermo-controller with adaptive linearization control techniques, improved process sensor technology, as well as a vacuum self-cleaning machine which ensures accurate, consistent and repeatable performance. Centura 5200 was developed to meet the needs of manufacturers requiring high-productivity enhancements. It is equipped with advanced motion control systems, ensuring precise movements, along with its high-speed, high-precision lifts and loading/unloading mechanisms. The tool also offers improved process speed and precision, along with improved wafer yield and uniformity. AMAT / APPLIED MATERIALS Centura 5200 is a high-performance choice for semiconductor manufacturers looking to reduce cycle times and improve product reliability. It is designed to be capable of processing various materials, incorporating an array of innovative features designed to boost productivity, minimize cost, and optimize product quality.
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