Used AMAT / APPLIED MATERIALS DPN+ Radiance #9263061 for sale
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AMAT / APPLIED MATERIALS DPN+ Radiance is a rapid thermal processor designed for advanced process control and a reliable, repeatable thermal process. It is capable of applying uniform temperatures between room temperature and over 1000°C with rapid thermal processing up to 1500°C. The Radiance equipment is equipped with a powerful convection heating system, incorporating Radiant Heat Transfer (RHT) technology with a closed-loop air recirculation unit. This allows for faster heating and cooling to enable short cycle times and precise temperature ramp rate control. The Radiance machine also provides superior temperature uniformity, with low thermal variance and tight temperature control accuracy. The Radiance tool is equipped with advanced monitoring and control features. Its integrated Recipe Management Asset (RMS) provides for accurate programmable recipes for batch sizes ranging from single wafers to several hundred wafers. AMAT DPN+ Radiance's advanced control software allows for future upgrades through software downloads, providing scalability and flexibility in a wide variety of manufacturing environments. The model can also perform live real-time tuning for optimal thermal process control. The Radiance equipment utilizes robust, high quality materials to ensure efficient operation and long lifetime. Its tall, atmospheric chamber is constructed from high temperature stainless steel and lined with ceramic and quartz components for optimal insulation. Its vacuum tight vertical sliding door provides easy access for wafer loading and unloading, and its air flow system is coupled with an IR radiation method of wafers that heat up quickly and uniformly. The Radiance unit also offers an optional dual HiPIMS source for superior temperature uniformity and repeatability. The HiPIMS technology can be used to boost temperature uniformity while reducing oxidation on aluminum layer surfaces. Additionally, the Radiance machine includes integrated safety features such as ambient pressure control and over-temperature protection to ensure the safety of all components and personnel. APPLIED MATERIALS DPN+ Radiance tool enables a repeatable and reliable thermal process to achieve uniform results in a wide range of manufacturing applications. The advanced process control features and reliable components allow for optimal, precise thermal response and high production yields.
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