Used AMAT / APPLIED MATERIALS Radiance RTP #9026095 for sale

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ID: 9026095
Chamber only, 12" Included with Chamber: Edge Ring Rotor; Post Rotation; Maglev Radiance Reflector plate (no He Purge) Pyrometer gauges Radiance Lamp (full set included) Rev 1 Lamp head assembly Remote Radiance Power Box Original RTC computer (converted to Ethernet) Gas Panel: ISSG Ready Gas Lines: N2, O2, H2, N2O, NO, NH3 Unit 8156 MFCs Not Included with Chamber: System Main-frame Main-Frame Power box Vacuum Pump Power Interconnects Note: Chamber has not been decontaminated Idle date: 2009 2002 vintage.
AMAT / APPLIED MATERIALS Radiance RTP is a revolutionary tool for rapid thermal processing that provides superior device performance and yield for advanced semiconductor fabrication. The unique microwave-induced plasma technology of the RTP maximizes energy efficiency by using radio frequency (RF) frequencies to rapidly heat and cool wafers in cleanroom-grade air without direct contact with the substrate. This method eliminates any chance of contamination from direct contact, making AMAT Radiance RTP the ideal tool for fabricating multiple layers of devices with high accuracy and consistency. APPLIED MATERIALS Radiance RTP offers four thermal processing options for tuning thermal profiles of low-kommunication interconnects. These include low temperature rapid thermal annealing (LT-RTA), rapid thermal nitridation (RTN), rapid thermal oxidation (RTO), and rapid thermal processing (RTP). Each of these options can be individually configured and controlled to provide precise thermal control. RTP also provides a capability for rapid on-wafer patterning and non-volatile memory device formation. Radiance RTP features a state-of-the-art digital industrial controller that provides accuracy, repeatability, and ease of operation. This includes a real-time monitor and trending of key parameters such as substrate temperature, time, and pressure. Access to historical data, diagnostic actions and scheduling of maintenance tasks are all made possible with AMAT ControlNet software. In terms of environmental performance, AMAT / APPLIED MATERIALS Radiance RTP offers reduced particulate levels, minimized waste generation, and zero-emission processing. The on-wafer plasma source generator also offers increased process stability and uniformity by providing an excess clock rate that helps avoid crystal damage and can extend device lifetime. AMAT Radiance RTP is a versatile tool for advanced semiconductor fabrication and device production. It's rapid thermal processing capabilities provide high accuracy and consistency, low contamination risk, and environmental performance that meets the most stringent industry standards. With its revolutionary microwave-induced plasma technology and state-of-the-art digital industrial controller, APPLIED MATERIALS Radiance RTP is the optimal choice for high performance and high yield fabrication.
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