Used AMAT / APPLIED MATERIALS Vantage Radiance #293591364 for sale
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ID: 293591364
Wafer Size: 12"
Rapid Thermal Processing (RTP) system, 12"
Process: ISSG
(2) Chambers.
AMAT / APPLIED MATERIALS Vantage Radiance is a rapid thermal processor (RTP) designed to take advantage of the latest advances in rapid thermal annealing, a process that quickly and efficiently enhances device performance for semiconductor devices.AMAT Vantage Radiance offers high-temperature processing capabilities that exceed other currently available RTPs. It combines highly efficient heating with tightly-controlled thermal uniformity, achieving excellent uniformity even at the highest temperatures. The modular design of APPLIED MATERIALS Vantage Radiance allows for maximum flexibility in implementation, giving the user the ability to customize the process setpoint and choose between either single wafer or cluster configurations. The equipment's intuitive user interface includes an easy-to-access programming system, with a number of programmable parameters supporting a range of conditions, including both single-wafer and multi-wafer processes. Vantage Radiance features a unique thermal control unit, which provides precise control over the temperature at the wafer level, allowing for the optimization of devices such as transistors and LEDs. The machine's temperature controller is designed to quickly and accurately bring the wafer to the setpoint, minimizing energy consumption and minimizing turnaround time. Due to the low process times, AMAT / APPLIED MATERIALS Vantage Radiance is also suitable for a range of metallization processes, including the deposition of PECVD and ALD films. The tool can also be custom-configured for specific metallization processes to maximize productivity. In addition to its rapid-thermal processing capabilities, AMAT Vantage Radiance also provides superior contamination resistance, thanks to its built-in cleaning functions. The asset uses high-pressure cleaning, plasma cleaning, and ozone sterilization to remove organic contaminants in the model prior to process start-up. APPLIED MATERIALS Vantage Radiance also offers a number of safety features, including cooling and purge systems as well as a reaction-quench capability, to ensure that processes are completed safely. Furthermore, the equipment is compliant with standards such as SEMI F47 and ISO 14644, providing an extra layer of security for operations. Overall, Vantage Radiance is a powerful, efficient, and reliable rapid thermal processor that offers superior thermal control and outstanding process results. Its advanced features and comprehensive safety protocols make it an invaluable tool for a wide range of semiconductor processing needs.
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