Used AMAT / APPLIED MATERIALS Vantage Vulcan #293706716 for sale

ID: 293706716
Wafer Size: 12"
Vintage: 2013
Rapid Thermal Processing (RTP) system, 12" 2013 vintage.
AMAT / APPLIED MATERIALS Vantage Vulcan™ is a rapid thermal processor that is specifically engineered to deliver the highest thermal processing accuracy and repeatability available. This advanced equipment ensures high performance and cost-sensitive solutions in a wide variety of thermal processing applications. AMAT Vantage Vulcan utilizes an innovative combination of advanced gas management technology and high-precision motion control to provide the highest uniformity of temperature and accurate temperature rate-of-change performance. Its highly efficient, low-cost design makes it ideally suited for a variety of thermal processing needs, including oxidation, nitridation, diffusion, annealing, deposition, and more. APPLIED MATERIALS Vantage Vulcan also features a sophisticated user interface that allows operators to quickly configure and adjust the parameters of their thermal processes. Vantage Vulcan offers maximum flexibility and versatility with a small footprint that allows for multiple thermal processes to be performed simultaneously. It offers up to three independent temperature zones, each of which can operate in batch or continuous processing modes. The advanced control system of AMAT / APPLIED MATERIALS Vantage Vulcan ensures maximum accuracy and repeatability by precisely controlling temperature at the wafer level. Cascaded temperature points are monitored at the wafer level to ensure tight temperature control for precise profile matching. The custom gas mixing and delivery unit on AMAT Vantage Vulcan uses a regulated gas flow of oxygen and nitrogen to ensure repeatable and predictable depositions. The gas control machine also utilizes enhanced automated gas delivery to the substrate for improved process uniformity. APPLIED MATERIALS Vantage Vulcan is an ideal solution for a wide variety of thermal process requirements. Its advanced design and technology make it a reliable solution for any thermal processing application, allowing for consistent quality and repeatable results.
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