Used AMAT / APPLIED MATERIALS Vantage Vulcan #293754435 for sale

ID: 293754435
Wafer Size: 12"
Vintage: 2012
Rapid Thermal Processing (RTP) system, 12" 2012 vintage.
AMAT / APPLIED MATERIALS Vantage Vulcan is a rapid thermal processor (RTP) that provides a high-performance, cost-effective alternative to traditional thermal processing. Used in semiconductor and flat-panel display (FPD) applications, AMAT Vantage Vulcan combines a rapid thermal annealer (RTA) with a reactive ion etch (RIE) equipment, allowing for in-situ plasma etch and anneal operations. APPLIED MATERIALS Vantage Vulcan is capable of achieving superior quality film and surface treatments, as well as rapid thermal processes that are critical for the manufacture of advanced semiconductor or flat-panel display components. The enhanced throughput performance of Vantage Vulcan enables it to achieve higher productivity and reduce processing times compared to other traditional thermal processors. The system is designed with an advanced Multi-Zone Control that provides high levels of thermal uniformity and precision thermal control, while maintaining cost-effective operation and providing an excellent return on investment. AMAT / APPLIED MATERIALS Vantage Vulcan also incorporates multi-zone control of pressure, gas flow, temperature, treatment time and other parameters to enable highly precise plasma process control. AMAT Vantage Vulcan can also be used with a variety of advanced process technologies, such as atomic layer deposition (ALD) and chemical vapor deposition (CVD). By using the latest plasma-enhanced processes, the unit can attain superior film uniformity with minimized thermal stress, thereby improving film adhesion and electrical performance. APPLIED MATERIALS Vantage Vulcan can further increase productivity by integrating with other equipment and providing batch-processing capability. With its fast cooling and heating rates, the machine is ideal for processing a large number of substrates quickly and efficiently, while maintaining high uniformity. Additionally, the tool can be operated in a variety of process chambers, making it suitable for a range of applications. Overall, Vantage Vulcan is a highly advanced thermal process asset designed to offer maximum productivity, optimum process uniformity and process control. This model is especially suited for applications requiring rapid thermal processing or high-quality film treatments. With its low operating cost and improved throughput performance, AMAT / APPLIED MATERIALS Vantage Vulcan is being increasingly adopted by leading manufacturers in the semiconductor and flat-panel display industries.
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