Used AMAT / APPLIED MATERIALS Vantage Vulcan #9316452 for sale

AMAT / APPLIED MATERIALS Vantage Vulcan is a revolutionary rapid thermal processor (RTP) designed for use in advanced semiconductor processing. AMAT Vantage Vulcan features a patent-pending high-efficiency technology—All-Gas Pulse Control—that enables superior results of thermal anneal processing with application targeting ranging from memory to logic device structures. Many of the performance advantages of APPLIED MATERIALS Vantage Vulcan result from the incorporation of AMAT proprietary microwave assisted reactive etch (MARE) technology. Vantage Vulcan utilizes MARE to achieve thermal anneal processing with lower E-beam and VUV intensity than traditional RTP platforms. This lowers the risk of device damage due to high temperature, and lowers the cost of ownership by ensuring less frequent maintenance of the RTP chamber. AMAT / APPLIED MATERIALS Vantage Vulcan also provides superior substrate temperature uniformity with better than ±3°C accuracy, which allows for precise thermal processes. The platform also offers shorter cycle times with quicker cooldowns, and the flexibility of pre-configured single-wafer recipes. In addition, AMAT Vantage Vulcan offers very low emissions of particles into the process chamber versus traditional RTP hardware, ensuring minimal degradation of the chamber environment. The platform offers inert or active gas introduction, with the ability to adjust gas flow for precision control. This provides a wide range of process opportunities for both dielectric and semiconductor metrology applications. APPLIED MATERIALS Vantage Vulcan is ideal for accelerated annealing, rapid diffusion, rapid oxidation, layered film development, and more. The robust but compact unit is equipped with a nitrogen chamber, ammonia-free chamber cleaning, and a helium-based temperature controller to ensure reliable and consistent results. The system can be operated either in-line or standalone, and it comes with multiple recipe memory and full memory back-up capabilities. Vantage Vulcan is an innovative RTP platform that provides high blend of reliable performance and cost-effectiveness.