Used AMAT / APPLIED MATERIALS Vantage Vulcan #9355344 for sale

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ID: 9355344
Wafer Size: 12"
Vintage: 2015
Rapid Thermal Processor (RTP), 12" 2015 vintage.
AMAT / APPLIED MATERIALS Vantage Vulcan rapid thermal processor is a production-grade, self-contained, rapid thermal processor designed to meet the rigorous demands of advanced semiconductor technology. It is capable of enrolling times of 15 seconds or less at temperatures up to 1350°C. The Vulcan is comprised of a single enclosure that houses the Rapid Thermal Processor (RTP) within a controlled environment. The RTP uses focused heat, along with patented, directed-air technology to quickly provide uniform and repeatable temperature profiles on wafers of up to 300mm. It is designed to meet a number of challenging process requirements, such as for low-EOM, DRAM, SRAM, flash, and other memory. The Vulcan is easy to operate and can be configured to run multiple process recipes with well-defined parameters, such as process temperature, ramp rate, and substrate movement rate. The process repeatability and accuracy are ensured through recipes which are written and monitored through AMAT EnGen thermal process control software. Additionally, the Vulcan incorporates a highly consistent and reliable scanning system, further ensuring the details of the process profile. The Vulcan reduces thermal cycling time, resulting in enhanced throughput and improved efficiency. It also offers a number of process capabilities to meet the demanding requirements of various memory solutions, such as charge pumping, dopant diffusion, storage node manufacturing, thermal oxidation, low-EOM processing, and polysilicon doping. The Vulcan allows for cleanroom integration, with fast and efficient entry and exit of wafers but all processing is done within the enclosure. It is constructed with heavy-duty materials to ensure long-term reliability. Additionally, the enclosed design allows for self-contained processing with minimal contamination and facilitates efficient waste and heat management. The Vulcan is an incredibly reliable and effective rapid thermal processor and its compact design makes it an ideal choice for the production of today's advanced memory solutions. It provides uniform and repeatable processing and it is also extremely cost-efficient, helping to ensure long-term savings.
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