Used AMAT / APPLIED MATERIALS Vantage Vulcan #9398185 for sale

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ID: 9398185
Wafer Size: 12"
Vintage: 2013
Spike RTP System, 12" (2) Chamber 2013 vintage.
AMAT (APPLIED MATERIALS) AMAT / APPLIED MATERIALS Vantage Vulcan is a Rapid Thermal Processor (RTP) designed for advanced chip fabrication. It is a single-wafer RTP equipment that offers high-temperature processing for a wide range of device technologies. AMAT Vantage Vulcan can accommodate various wafer sizes and substrate materials, and is specifically designed for aggressive processing applications. APPLIED MATERIALS Vantage Vulcan offers uniform temperature throughout its heated process chamber, allowing for precise temperature control and wafer-by-wafer consistency. It features a proprietary pre-ionizarion and post-purge system, minimizing particle deposition and maximizing cycle throughput. Vantage Vulcan includes an advanced Recipe automation unit and On-board monitoring (OBM) with real-time data collection, allowing users to optimize their process quickly. The heating machine of the Vulcan boasts an advanced Pyrometer, allowing it to achieve temperature ramp rates of up to 20°C/s, making it one of the fastest and most reliable RTP systems available. It also includes an advanced gas distribution tool, offering precise flow control and uniform pressure throughout the process chamber, maximizing chamber stability and process accuracy. AMAT / APPLIED MATERIALS Vantage Vulcan also offers superior stability, thermal uniformity and repeatability, making it the ideal choice for advanced device manufacturing. It is designed for easy installation and maintenance, featuring quick-change cassettes, simplified wafer loading, and automated wafer support. The asset is also highly energy efficient, thanks to a superconducting pre-magnetheder and low-cost chiller units. Overall, AMAT Vantage Vulcan is a high-performance and reliable Rapid Thermal Processor. It offers superior temperature uniformity, cycle throughput, and faster ramp rates for aggressive processing, making it the ideal tool for advanced device manufacturing.
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