Used AMAT / APPLIED MATERIALS Vantage #9226027 for sale
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ID: 9226027
Wafer Size: 12"
Vintage: 2006
Rapid Thermal Processing (RTP) system, 12"
Wafer type: SNNF
A & B Chamber type: RTP Radiance RP vantage
A & B RTP Radiance RP vantage chamber:
Process application: Core anneal RTO & ISSG
O2 Analyzer
Lamp driver, P/N: 0190-17056
MFC 1: N2 50 slm HORIBA Stec sec-z12dmn
MFC 2: O2 50 slm HORIBA Stec sec-z12dmn
MFC 3: O2 5 slm HORIBA Stec sec-z11dm
MFC 7: H2 20 slm HORIBA Stec sec-z12dm
MFC 8: H2 3 slm HORIBA Stec sec-z514mgx
MFC 11: He 30 slm HORIBA Stec sec-z12dm
MFC 12: He 50 slm HORIBA Stec sec-z12dm
MFC 13: N2 100 slm HORIBA Stec sec-z12dmn
WRLD Maglev assembly, P/N: 0190-14175
Interface options:
OHT WIP Delivery
Loadports
Enhanced 25-wafer foup
OHT Light curtain
Chamber A interface: Radiance interface panel, P/N: 0465-07030
Chamber B interface: Radiance interface panel, P/N: 0465-07031
Remote options system monitor:
Monitor 1: Flat panel with keyboard on stand, P/N: 0395-00099
Monitor 1 cable, 25 Foot
Monitor 2: Through the wall flat panel with keyboard, P/N: 0460-50048
Monitor 2 cable, 25 Foot
Umbilicals:
Chamber AC Box to heat exchange, 75 Feet
H/A, AMAT / APPLIED MATERIALS KVM to user interface with EVC, 25 FT
P/N: 0140-06462 / 0150-13813 / 0150-14109
Robot, YASKAWA BTV Darp manipulator, QS Vantage FI, P/N: 0220-39516
Reflective wafer on blade, P/N: 0220-39702
Cables, P/N: 0150-14109 / 0150-13813 / 0140-06462
(2) Facility brackets / Covers
(2) Front monitors, keyboards & bezels
Exhaust line and KF flex hoses
Gas line adapter: 90° Elbows
Options & electrical requirements:
Line voltage: 200/208 V
System safety equipment
Mainframe
Process chamber options
No heat exchange
No rough pumps
2006 vintage.
AMAT / APPLIED MATERIALS Vantage is a Rapid Thermal Processor (RTP) that is used to form ultra-high-precision layers in microelectronic circuits. This processor is designed to rapidly heat small substrates over a wide range of temperatures and provides excellent thermal control over the entire process. AMAT Vantage is made with a compact form factor that can fit in most production line footprints and offers reliable and tight thermal control. The processor utilizes a customizable chamber design and provides users with both high-end process control and excellent repeatability. APPLIED MATERIALS Vantage is equipped with a set of features that offer unmatched control and stability. The Rapid Thermal Processing (RTP) technology is implemented in the machine to enable fast and easy transitions in temperature. This feature allows users to accurately control substrate heating and cooling rates while achieving uniform temperatures throughout the entire process. Additionally, the processor is designed with an adjustable and tunable infrared (IR) sensor that is used to measure substrate temperatures. This feature provides users with real-time data that can be used to make adjustments during the thermal process. The embedded control loop within Vantage also allows users to precisely control the heating and cooling of the substrate. AMAT / APPLIED MATERIALS Vantage also includes a set of additional safety features that ensures a safe working environment. These safety features include a triple-layered safety curtain with impact resistant polymer material as well as an advanced dual-filtration system to provide air purification. Additionally, the processor utilizes advanced motion processing algorithms to accurately predict potential hazards within the chamber. Overall, AMAT Vantage is an ideal choice for companies looking to rapidly heat small substrates. This processor utilizes innovative features that provide users with the highest level of process control and reliability. Additionally, APPLIED MATERIALS Vantage is equipped with a host of safety features that help ensure a safe working environment when using the machine.
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