Used AMAT / APPLIED MATERIALS Vantage #9284534 for sale

AMAT / APPLIED MATERIALS Vantage
ID: 9284534
Rapid Thermal Processing (RTP) system.
AMAT / APPLIED MATERIALS Vantage Rapid Thermal Processor is an advanced thermal processing equipment that enables semiconductor device manufacturers to produce the highest quality semiconductor products in the fastest time possible. It provides thermal cycling with millisecond transient control, precise temperature profiles, and sophisticated gas delivery options. AMAT Vantage RTP equipment is one of the most sophisticated thermal processing tools available for the semiconductor industry. APPLIED MATERIALS Vantage RTP utilizes multiple heating elements to provide precise temperature control at each processing step. These heating elements consist of an infra-red (IR) radiator, which radiates heat, and a hot gas source, which transfers heat. The IR radiator and the hot gas generator are arranged in an array of two or three modules to enable accurate temperature control. Heat is regulated through the active control of the IR radiator and the hot gas source to ensure that the exact amount of heat is applied to the wafer. Vantage RTP also offers process chamber communication (PCC) system that enables the user to interact with the unit in real time. This PCC machine provides direct feedback on the current temperature profile, chamber shutter motion, temperature alarm, and other parameters through a graphical user interface. Additionally, the tool provides automated real time logging for data mining and detailed post processing. This enables users to look back on process data and make process adjustments as needed. AMAT / APPLIED MATERIALS Vantage RTP features a micro-processor with a comprehensive set of features that provide precise control over the thermal profile while still allowing for processing flexibility. For example, AMAT Vantage RTP features a multi-point temperature profile mode, a high-speed ramp rate mode, a low-temperature bake-out mode, and a low-temperature rapid-thermal-annealing mode. These user-programmable features enable users to tailor the thermal profile to their specific needs. APPLIED MATERIALS Vantage RTP also includes an on-board gas control asset (GCS) that provides precise temperature control and atmospheric composition monitoring. The GCS also allows users to mix specific gas mixtures and closed-loop feedback control for accurate atmospheric control. This ensures accurate and repeatable processing conditions. Overall, Vantage RTP is a powerful and sophisticated thermal processing model. It provides precise temperature control and user-programmable features, allowing customers to tailor the thermal profile for their specific needs. Additionally, its GCS allows users to monitor and control the atmosphere in the process chamber. This ensures accurate and repeatable processing conditions.
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