Used APSYSTEM KORONA-1200P #9311064 for sale
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ID: 9311064
Wafer Size: 12"
Vintage: 2011
Metal RTN system, 12"
Process: IMP
2011 vintage.
APSYSTEM KORONA-1200P is a rapid thermal processor ideal for applications in data storage, electronics packaging, photovoltaics and a range of other industries. It is a comprehensive thermal processing equipment that combines rapid heating and cooling with precision thermal control. The key feature of KORONA-1200P is its rapid heating and cooling capability. It is capable of heat processing up to 500 Watt/cm2 and cooling rates in excess of 15°C/second with a response time of less than 0.5 seconds. The system combines advanced thermal sensors and closed-loop real-time control technology with precise thermal modeling algorithms to ensure superior performance. APSYSTEM KORONA-1200P is designed for quick and easy operation with an easy to use 10.4" color touch screen on the face of the processor, intuitive user menus, and simple recipe management. It is equipped with a 4.5 kW RF generator and a 12" x 12" processing chamber to enable superior repeatability and throughput. The unit has a temperature range of 10 to 800°C, temperature uniformity of ±2°C and is capable of performing multiple stages of temperature cycling. The machine features a variety of built-in safety features such as pressure release valves, door interlock sensors, oxygen limit and pressure sensors as well as temperature and humidity sensors. In addition, the tool is capable of up to four gateways with full automatic uniformity control. KORONA-1200P is a highly efficient, reliable and cost-effective rapid thermal processor capable of delivering consistent thermal cycles with excellent thermal uniformity and heating/cooling rates. It is designed for quick and easy operation with intuitive user menus, advanced safety features and superior thermal modeling algorithms. It is ideal for a wide variety of thermal processing applications in the electronics, photovoltaics, data storage and other industries.
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