Used APSYSTEM KORONA-1200P #9311066 for sale

APSYSTEM KORONA-1200P is a state-of-the-art rapid thermal processor, a high-productivity manufacturing tool for reliable thermal processing of semiconductor devices and materials. The processor provides superior performance for rapid annealing, diffusion and oxidation processes. KORONA-1200P offers excellent temperature uniformity and control throughout the chamber for improved process results. It utilizes a rapid heating/cooling equipment of infrared lamps and thermoelectric cooler, resulting in temperature ramp rates up to 60°C/sec and temperature regulation to ±2oC. The robust plasma hydrocarbon deposition ion sources provide fast annealing / diffusion / oxidation and other process control for stable high-performance results. The system offers an automated gas delivery unit for exact delivery of process gases, as well as an integrated furnace for dry-firing. The integrated CVD machine includes nitrogen-oxygen (N2O2) and standard exhaust-gas water scrubber, for clean and safe operation. In addition, it includes an integrated DC power supply, Vacuum-UV photodetector (VUV) and quartz crystal microbalance (QCM) for precise process control. APSYSTEM KORONA-1200P has a programmable controller with menu operated inputs, allowing operator-independent setup of process parameters and start-up. It offers a modular design with user-adjustable components and flexible automation options, including robotics and process monitoring. The processor provides an ideal learning solution for laboratories and research & development applications. Its advanced software solutions and remote control capabilities enable users to run, monitor and manage their process parameters from a remote location. KORONA-1200P is a powerful, sophisticated and reliable rapid thermal processing tool. It is the optimal solution for producing high-quality and reliable microelectronic products quickly and cost-effectively.