Used APSYSTEM KORONA-12SP #293610720 for sale

APSYSTEM KORONA-12SP is a rapid thermal processor (RTP) specifically designed for process improvement of semiconductor wafers, ensuring that the highest quality of Semiconductor device production is achieved. KORONA-12SP has two independently controlled chambers, each with precise temperature, pressure and uniformity of transfer of heat through contact with the wafer. The specialized heating system at the heart of APSYSTEM KORONA-12SP is designed to provide a precise thermal balance through the handling of all major thermal parameters, including the thermal power of each chamber, as well as the temperature and energy headroom. This precise thermal balance ensures a process stability, which has a high chip yield and improved device performance for more consistent, high quality devices. This stable temperature measurement also ensures precise, repeatable results over time. The precise process control is managed through the use of solid-state sensors, which can measure and monitor a range of parameters. This includes the ability to monitor temperatures both within each chamber, and across the wafer itself. This data is collected in real time and can be used to quickly adjust thermal parameters, ensuring repeatable and reproducible process results. Furthermore, KORONA-12SP can be configured to accommodate a range of wafer sizes, from 25mm to 200mm. This combined with the robust heat transfer capability of the system ensures that the best possible thermal uniformity is achieved across a range of wafer sizes. APSYSTEM KORONA-12SP also has the ability to process a range of materials including Silicon, organic materials, and other substrates. KORONA-12SP is an advanced RTP solution that provides a precise thermal environment for the improvement of semiconductor wafer process performance. Its precise thermal uniformity, combined with the detailed process control provided by its onboard monitoring system help to ensure high quality device production with consistent, repeatable results.