Used APSYSTEM KORONA-12SP #293666860 for sale

APSYSTEM KORONA-12SP
ID: 293666860
Rapid Thermal Processing (RTP) systems.
APSYSTEM KORONA-12SP is a rapid thermal processor (RTP) designed to quickly thermally treat a variety of semiconductor wafers. It uses advanced direct heating technology that utilizes rapid accelerations to reach peak temperatures on the sample within milliseconds. The processor features a built-in chemical vapor deposition (CVD) tube and a direct-heating cathode, allowing users to uniformly heat the entire wafer surface. KORONA-12SP itself is air-cooled, meaning that no liquids must be used for cooling of the wafer. The machine comes equipped with a multi-jet process module, which allows the processor to change the wafer's environment quickly and precisely. By changing the pressure, gas flow, and temperature within this module, users are able to control the rate of diffusion or deposition on the sample. APSYSTEM KORONA-12SP also features an advanced microwave-heated latch. This latch is used to hold the wafer securely during treatment, preventing it from slipping during rotation. The latch also contains a built-in heating element, eliminating the need for a separate heat source during treatment. In order to ensure precise temperature control, KORONA-12SP is equipped with an advanced infrared temperature sensing equipment. This system monitors the temperature of the wafer, adjusting heat output as necessary. APSYSTEM KORONA-12SP also features a high-quality safety unit. The processor is equipped with warning alarms, which alert the user when the temperature nears a set threshold. Additionally, there are various locks and catches to ensure that the sample is secure during operation. Overall, KORONA-12SP is a reliable, efficient processor, designed to quickly treat a wide variety of semiconductor wafers. Its built-in chemical vapor deposition tube, direct-heating cathode, multi-jet process module, microwave-heated latch, and infrared temperature sensing machine allow precise and accurate thermal treatment, ensuring optimal results. Additionally, its safety mechanisms ensure that the processor is operated safely at all times.
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