Used AXCELIS / FUSION (Rapid Thermal Processors) for sale

Axcelis is a renowned manufacturer in the semiconductor industry, specializing in rapid thermal processors (RTPs). Their Fusion line of RTP systems offers advanced temperature control and process uniformity, ensuring precise heating and cooling cycles for various semiconductor fabrication processes. Axcelis' RTPs boast several advantages over conventional processing methods. Firstly, they provide rapid thermal annealing, delivering high temperatures much faster and more accurately than traditional furnaces. This feature greatly reduces cycle times and enhances overall productivity. Additionally, Axcelis' Fusion RTPs offer superior process flexibility, making them well-suited for a wide range of applications, including dopant activation, silicide formation, and oxide growth. Some notable examples of Axcelis' Fusion RTP systems include the Integra RS, 800S, and Summit 200. The Integra RS is a versatile system offering both frontside and backside heating capabilities, ensuring optimal uniformity. The 800S is a high-performance RTP known for its exceptional temperature control and low energy consumption. Lastly, the Summit 200 is designed for ultra-shallow junction formation and delivers outstanding process repeatability. Overall, Axcelis' Fusion RTPs provide semiconductor manufacturers with precise and efficient solutions for thermal processing, allowing for improved device performance and yield.