Used AXCELIS Summit 300XT #9359564 for sale
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AXCELIS Summit 300XT is a rapid thermal processor designed to provide highly productive and precise thermal processing for a variety of applications. The equipment uses dry-spatial annealing and high-temperature co-fires for optimized processes. It features a dual-zone hotplate with ribbon-like radiant lamps and a recirculating air flow to reduce thermal budget and improve temperature uniformity. A range of optional remote temperature sensors allows users to monitor temperatures for accurate control of processing conditions. The processor is designed with enhanced safety features, including an interlock system and temperature sensors for personnel protection from the hot chamber. A unique recirculating air flow unit helps maintain a uniform temperature within the chamber, reducing thermal budget by up to 50%. This helps to reduce the time required to process a product. The processor is designed for applications including annealing of semiconductors, diffusion of dopant and thermal oxidation of oxide. It is also suitable for passivation, alloying and recrystallisation of very small areas of samples. The machine incorporates a dynamic gas control tool, which enables the user to precisely adjust the furnace atmosphere to meet process requirements. An active stationary gas asset ensures the uniform distribution of gas flow. Summit 300XT was designed to provide superior throughput and reliability. The model's unique small footprint makes it ideal for supporting multi- process capabilities in R&D and production facilities. The equipment has an innovative, integrated controller, and includes a range of sensors and safety options that help to maximize efficiency and maximize process reliability. AXCELIS Summit 300XT is an ideal solution for a range of applications requiring high temperatures and small spaces. It provides enhanced safety, improved efficiency, higher throughput and precision for thermal processing needs.
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