Used AXCELIS Summit 300XT #9362104 for sale
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ID: 9362104
Wafer Size: 12"
Vintage: 2001
Rapid Thermal Processing (RTP) system, 12"
Process: Oxide, Anneal
CIM: SECS GEM
(2) Transfer loadlocks / Cooling stations
Mini environment
(2) Furnace process modules
Transfer chamber
(2) GENMARK Wafer handlers
Factory interface: (3) FOUPs
Load port non-functional
2001 vintage.
AXCELIS Summit 300XT is a high-performance rapid thermal processor designed for the production of wafer-based integrated circuits. Summit 300XT was designed to improve the manufacturing process of integrated circuit wafers while significantly reducing costs. AXCELIS Summit 300XT offers a variety of features for efficient and accurate thermal processing. The processing chamber incorporates the latest in thermally efficient insulation, allowing for faster and more even heating and cooling of wafers. Additionally, the chamber design eliminates the need for additional wafer transfer equipment, making the equipment faster and more reliable than traditional production systems. The rapid thermal processor also incorporates a multi-stage heating and cooling system for precise, uniform, and repeatable thermal processing. Summit 300XT also features precise temperature and gas flow control, making it ideal for a wide variety of manufacturing processes. It can be easily integrated into existing production systems, allowing for immediate productivity improvements. For added convenience, the unit features remote access capabilities, allowing operators to monitor and adjust operations from a remote location. AXCELIS Summit 300XT also boasts advanced safety features to ensure safe and reliable operations. The machine includes emergency shutoffs, to prevent excessive temperatures or gas pressure, as well as advanced monitoring and diagnostic systems which allow operators to quickly and accurately troubleshoot any issues. To conclude, Summit 300XT is a cutting-edge rapid thermal processor designed to improve the production processes of integrated circuits while reducing overall cost. The tool offers advanced features such as uniform and repeatable thermal processing, precise temperature and gas flow control, and emergency shutoffs. Additionally, the asset can be easily integrated into existing production systems, with remote access capabilities for added convenience.
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