Used AXCELIS Summit #9359567 for sale

AXCELIS Summit
ID: 9359567
Rapid Thermal Processing (RTP) system.
AXCELIS Summit is a Rapid Thermal Processor (RTP). It is a high-throughput thermal tool designed for electronic device processing in the semiconductor industry. Summit is the most reliable and effective Rapid Thermal Processor currently available. AXCELIS Summit provides a combination of superior thermal performance, uniformity, and accuracy that is critical for device manufacturing with the highest levels of control. Summit features two independent dual-zone chambers, each providing independent heating and control functions for optimal temperature uniformity and processing accuracy. AXCELIS Summit's process chamber has an innovative indirect heating element system that evenly distributes energy uniformly across its entire area, ensuring precise control over the wafer heating profile. Advanced temperature sensing and control technology provides excellent profile accuracy and high chamber temperatures for superior device performance. Summit's dual-zone heating system utilizes a unique direct/indirect heating technology to deliver superior temperature uniformity and a stable, predictable temperature profile. A single-zone RTP offers a single set of radiative heating elements controlled by independent, independent, programmable controllers. This dual-zone RTP provides two radiative heating elements, each with its own dedicated controller, so the temperature profile and uniformity in each zone can be adjusted independently. AXCELIS Summit is highly customizable and configurable to meet the needs of virtually any wafer processing application. It supports many different processes including both standard and advanced high temperature recipes. Temperature control is versatile and flexible, constrained only by the limits of the application. Summit's numerous options include remote recipe selection, advanced controls algorithms, automatic recipe-sensing hardware validation, rotation capabilities, backside heating, multiple wafer cassette configurations, and independent closed-loop temperature control of each heater zone. AXCELIS Summit's user-friendly interface allows for highly accurate temperature control and eliminates the need for complex calculations to modify recipes. Its intuitive graphical user interface (GUI) allows users to control the RTP easily and efficiently with minimal adjustment. Summit is a reliable, high performance, and cost-effective solution for single wafer processing. It provides superior thermal performance and uniformity to ensure the highest levels of device yield and performance. It is an ideal choice for those who require an efficient, reliable, and accurate single wafer processing solution.
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