Used BOC EDWARDS Helios 1 #9203075 for sale

BOC EDWARDS Helios 1 Rapid Thermal Processor is a versatile, reliable and efficient thermal system designed for high-precision processing of modern semiconductor devices. It is capable of rapid thermal processing up to 1,200°C with a maximum ramp rate of up to 300°C/second. By utilizing its high-speed ramps, the system is able to dramatically reduce thermal cycling time, resulting in faster turn-around-time between process steps. Helios 1 is equipped with an ultra-fast lapped quartz susceptor and ranges from 500 mm to 150 mm wafer sizes. It is designed with different zones that are independently controlled and heated, allowing precision temperature profiling for better process control. BOC EDWARDS Helios 1 offers superior uniformity across its process chamber to achieve repeatable results with each process. In addition, it has customizable annealing and diffusion profiles, and it can be equipped with bells, relays and other accessories to enable advanced capabilities such as pre-heat and cooling stages. Helios 1 is designed with advanced motion control and easier maintenance capabilities. It is equipped with an Auto-load/Unload tile to reduce manual loading and unloading time, and it includes software that enables the user to easily schedule, monitor, and adjust thermal processes. It also offers enhanced data collection capabilities, enabling enhanced monitoring and control of the thermal process. BOC EDWARDS Helios 1 is a reliable and efficient rapid thermal process system that offers significantly faster thermal ramp rates, excellent thermal uniformity, and customizable profiles to achieve high precision results. Coupled with its Auto-load/Unload tile and automated heater replacement, Helios 1 is an invaluable tool for modern semiconductor processing.