Used BOC EDWARDS Helios-E #293604396 for sale

ID: 293604396
Vintage: 2004
Gas abatement scrubber system 2004 vintage.
BOC EDWARDS Helios-E is a high-speed and highly efficient rapid thermal processor designed for commercial and industrial applications that require accurate temperature control and excellent uniformity. It is the ideal choice for applications that require highly precise uniform surface temperature and short processing times. Helios-E is made to process a wide range of materials, including metal oxides, polysilicon, and nitride-based materials, through surface activation and pre-treatment. The key features of this device include a broad temperature range of up to 800°C and a large work area of 27.5" × 33.5", allowing it to accommodate large substrates. Additionally, BOC EDWARDS Helios-E uses an extracted, nitrogen-filled chamber to maintain a uniform atmospheric environment and protect the wafers from acquiring contamination or oxidation. The removable top and bottom heating elements are designed to obtain the highest uniformity, even when dealing with high heating and cooling rates. Furthermore, the device is equipped with an intuitive touch screen for accurate settings and data monitoring, as well as a PC-based monitoring and control system for easy programmability and remote operations. The system's software is designed for user-friendly operation and programming. Additionally, it is equipped with a closed loop, digital temperature control unit that responds to temperature changes that occur during the heating and cooling processes. Furthermore, Helios-E is equipped with advanced safety features, such as a low pressure light and high-temperature alarms, providing added protection and safety. The processor is also customer configurable and can be programmed to run multiple applications and multiple processes, making it versatile and suitable for use in a variety of high-volume processing environments. Overall, BOC EDWARDS Helios-E is an efficient and reliable rapid thermal processor that boasts a high degree of uniformity and thermal accuracy. It is equipped with all the necessary features to ensure a wide range of accurate temperature processes, thereby providing a safe and efficient heating and cooling system for industrial and commercial applications.
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