Used BOC EDWARDS Helios-S #9096426 for sale
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ID: 9096426
Vintage: 2002
Gas abatement scrubber system
P/N: Y12024010
2002 vintage.
BOC EDWARDS Helios-S is a rapid thermal processor designed to meet the needs of semiconductor and other related industries. It is a highly reliable platform for process development in the wafer fabrication process. This technology is capable of a wide range of applications, covering annealing, rapid thermal annealing (RTA), oxidation and diffusion. Helios-S technology integrates hardware, software, and advanced, patent-pending, process development tools, to offer a complete thermal process platform that delivers the quickest time-to-market and the highest production yield. BOC EDWARDS Helios-S platform offers additional efficiency by allowing users to customize their process development to optimal conditions for a particular application. With Helios-S platform, process developers can take advantage of features such as exceptionally low thermal cycle times, precise temperature profiling, variable duty cycle frequency, mean-time-to-failure calculations, automated recipe creation, and on-the-fly hardware configuration. All these features come together to give the user the ability to achieve their desired process goals faster, more consistently, and with much greater reliability. BOC EDWARDS Helios-S platform also offers the highest level of safety and flexibility to the user. Its safety features include a robust Emergency Stop function, innovative Power Up Sequence, Automatic Cool Down, and automatic Thermal Cycling. The flexible menu control functions allow a full range of settings to be easily changed depending on the application. Users can also select from a variety of heater kits, thermal resistance heaters, and cold plates to match their particular process requirements. Helios-S technology is the most comprehensive, efficient, and reliable thermal processor available, making it the perfect choice for those in the semiconductor industry looking for an advanced, rapid thermal processor. With its robust system design, safety features, and automated process development tools, it is sure to meet the needs of any process development project.
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