Used BOC EDWARDS Helios #168833 for sale

BOC EDWARDS Helios is a rapid thermal processor (RTP) manufactured by BOC EDWARDS, a technology leader in vacuum systems, abatement, and semiconductor manufacturing. Helios RTP is a high-performance parallel wafer-processing equipment specifically designed for use in the production of semiconductor devices. BOC EDWARDS Helios RTP provides a single, automated solution for a variety of processing operations, including thermal oxynitridation, annealing, diffusion, and etch. It is capable of processing up to sixteen wafers at a time of up to eight-inch diameter, with a total wafer load of sixty-eight wafers. Helios RTP features a modular design with the capability to expand, allowing manufacturers the flexibility to configure their system to meet their production needs. The unit has five independent modules, each with its own controller to deliver uniform, repeatable, and reliable performance. The E-Century Automation Machine controls, monitors, and manages the processing operations to provide consistent and reliable results without the need for manual tuning or frequent program modification. The E-Century Automation Tool also integrates with factory automation and process monitoring systems such as fab-wide and enterprise resource management (ERP) software to ensure compatibility with existing production systems. The wafer shuttle maximizes efficiency by ensuring uninterrupted and real-time process control. This allows for the significant reduction in the overhead time required to load and unload batches, meaning more efficient and cost-effective production cycles. BOC EDWARDS Helios RTP is ideal for manufacturers seeking high throughput, precise control, and maximum flexibility when it comes to their semiconductor production processes. With its modular design, uniform processing performance, integrated software, and automated operation, Helios RTP provides reliable, repeatable results with maximum productivity.