Used BOC EDWARDS Helios #9096427 for sale

BOC EDWARDS Helios is an advanced rapid thermal processor (RTP) that enables thermal annealing processes such as siliciding, dopant activation, defect healing, metallization and crystallization to be readily incorporated into semiconductor device fabrication. Helios thermal process equipment uses a combination of high-power lamps and gas-driven heaters that can be configured to provide temperatures up to 1,200°C. Its tightly controlled heating capability is ideal for a range of process applications including annealing, recrystallization, hardening and patterned annealing. BOC EDWARDS Helios is designed using a dual-zone-of-control and a patented doped-YAG heat radiator scheme. This enables a high degree of flexibility and power control, allowing the user to rapidly switch between processes while maintaining a high degree of fidelity and uniformity of processing. Helios also includes a powerful graphical user interface (GUI) controller, enabling efficient operation and improved process visibility. The system includes a variety of monitoring tools, such as an integrated infrared camera, to monitor process parameters and machine performance through its analysis software, providing the user with real-time visibility into the process. In addition, BOC EDWARDS Helios offers multiple control schemes to precisely manage the thermal process while achieving high throughput rates. This includes open loop control, manual control and fully-automated recipe-driven control. Helios also features a high specification N2 purging unit, which eliminates the need for storing large amounts of nitrogen, as well as a Micro ESC reactant machine for recipe building and management. This helps ensure that any process-related materials are quickly and accurately fed into the tool. BOC EDWARDS Helios rapid thermal processor is ideal for most applications requiring fast, accurate thermal processing. With its flexible configuration, robust control systems and intuitive software, Helios allows users to maximize device performance while minimizing process time and cost.