Used EATON NOVA / AXCELIS Summit XT #9095589 for sale

EATON NOVA / AXCELIS Summit XT is a rapid thermal processor that rapidly processes quality wafer materials such as silicon, germanium, gallium arsenide, and superlattices at temperatures from 600°C to 800°C. It is specifically designed for sub-micron lithography applications, allowing precise etching and doping of metal layers and other materials for wafer creation. AXCELIS Summit XT can process up to 18 wafers at a time and can run continuously, enabling fabrication of multiple wafers in a short amount of time. The equipment uses induction heating technology, developed by AXCELIS, to heat wafers quickly and efficiently. The system also features a four zone hot-walled calciner called the Pulsar 12, with an optimized resistive-heating element, allowing precise temperature control. EATON NOVA Summit XT offers high accuracy and repeatability, as well as a process window for thermal oxidation and etching. It features automated computer controlled process steps along with a self-diagnosing capability for increased operator safety. The machine is also equipped with advanced diagnostics, such as digital temperature profile and per-zone temperature feedback. A real-time recipe database is available, allowing for preprogrammed repeatable processes. Summit XT offers excellent process uniformity and improved process repeatability, particularly when dealing with difficult-to-process materials such as polysilicon. It is a low-maintenance unit, designed with modular components and reduplicative redundancy for easy repair and service. EATON NOVA / AXCELIS Summit XT includes many standard features, such as internal thermocouple temperature-measuring ports and a process controller providing the machine with real-time automatic action. It also includes detailed process monitoring, automatic safety lock-out, and safety control relay. The tool also offers Nitrogen and Argon ambient control options, auto gas shut-off, and a remote shutdown connection. In summary, AXCELIS Summit XT rapid thermal processor is a reliable and accurate asset that is designed to quickly process wafers with precision and repeatability. It is simple to operate, offers a variety of process options, and provides advanced diagnostics and safety features.